Microwave plasma CVD diamond layers on three-dimensional structured Si for protective coating

H. Csorbai, A. Kováts, S. Kátai, G. Hárs, C. Dücs, E. Kálmán, P. Deák

Research output: Contribution to journalArticle

7 Citations (Scopus)

Abstract

It is well known that a secondary plasma is created during the late period of the bias enhanced nucleation (BEN) process, which ultimately affects the quality (texture, morphology) of the deposited layer in an unfavourable manner. Our earlier ion beam mass spectrometry (IBMS) measurements have shown a significant increase in the kinetic energy of the incoming ions to the surface in the presence of this secondary plasma. Reducing the bias, the kinetic energy of the ions is correspondingly reduced, so the detrimental effect to the freshly generated surface is substantially diminished. The technique can also be used to ensure a homogeneous coating of three-dimensional structures. We describe a multi-step nucleation/deposition microwave plasma CVD process. Based on computer simulations of the electric field, two nucleation periods were used. In the first one, a constant 200-V DC bias was applied, while in the second nucleation period, the biasing voltage was controlled in time in a stepwise-like manner. By this technique, a pinhole-free protective coating could be deposited onto the silicon surface of a micromachined capacitive pressure sensor chip.

Original languageEnglish
Pages (from-to)519-522
Number of pages4
JournalDiamond and Related Materials
Volume11
Issue number3-6
DOIs
Publication statusPublished - Mar 2002

Fingerprint

Plasma CVD
Diamond
protective coatings
Protective coatings
Diamonds
Nucleation
diamonds
Microwaves
vapor deposition
nucleation
microwaves
Kinetic energy
kinetic energy
Ions
Plasmas
Capacitive sensors
Pressure sensors
Silicon
pinholes
pressure sensors

Keywords

  • Diamond growth and characterisation
  • Nucleation
  • Sensors

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Materials Chemistry
  • Surfaces, Coatings and Films
  • Surfaces and Interfaces

Cite this

Microwave plasma CVD diamond layers on three-dimensional structured Si for protective coating. / Csorbai, H.; Kováts, A.; Kátai, S.; Hárs, G.; Dücs, C.; Kálmán, E.; Deák, P.

In: Diamond and Related Materials, Vol. 11, No. 3-6, 03.2002, p. 519-522.

Research output: Contribution to journalArticle

Csorbai, H. ; Kováts, A. ; Kátai, S. ; Hárs, G. ; Dücs, C. ; Kálmán, E. ; Deák, P. / Microwave plasma CVD diamond layers on three-dimensional structured Si for protective coating. In: Diamond and Related Materials. 2002 ; Vol. 11, No. 3-6. pp. 519-522.
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