Microwave-CVD diamond protective coating for 3D structured silicon microsensors

H. Csorbai, P. Fürjes, G. Hárs, C. Dücső, I. Bársony, E. Kálmán, P. Deák

Research output: Contribution to journalArticle

2 Citations (Scopus)

Abstract

In this work a multi-step nucleation-deposition MW-CVD process is presented developed for contiguous covering of 3 dimensional Si bulk micromachined structures. A correlation between the nucleation rate and the electric field distribution over the 3D surface was established. The layer integrity was characterised by scanning electron and atomic force microscopy. The pinhole density of the layers was measured by conventional alkaline underetching method. This technique is primarily suitable for the characterisation of layers deposited on flat surfaces and was used as a reference for the electrochemical method applied for the non-planar surfaces. Application of the protective coating was demonstrated on the surface of a Si capacitive pressure sensor chip.

Original languageEnglish
Pages (from-to)69-74
Number of pages6
JournalMaterials Science Forum
Volume414-415
Publication statusPublished - 2003

Fingerprint

Microsensors
Diamond
protective coatings
Protective coatings
Silicon
Chemical vapor deposition
Diamonds
diamonds
Microwaves
vapor deposition
microwaves
silicon
nucleation
Nucleation
pinholes
pressure sensors
Capacitive sensors
integrity
flat surfaces
Pressure sensors

Keywords

  • Corrosion resistance
  • CVD reactor
  • Mechanical sensor
  • Nucleation
  • Polycrystalline diamond film

ASJC Scopus subject areas

  • Materials Science(all)

Cite this

Microwave-CVD diamond protective coating for 3D structured silicon microsensors. / Csorbai, H.; Fürjes, P.; Hárs, G.; Dücső, C.; Bársony, I.; Kálmán, E.; Deák, P.

In: Materials Science Forum, Vol. 414-415, 2003, p. 69-74.

Research output: Contribution to journalArticle

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AU - Fürjes, P.

AU - Hárs, G.

AU - Dücső, C.

AU - Bársony, I.

AU - Kálmán, E.

AU - Deák, P.

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