Microstructural evolution during film growth

I. Petrov, P. Barna, L. Hultman, J. E. Greene

Research output: Contribution to journalArticle

1100 Citations (Scopus)

Abstract

A report on the microstructural evolution during film growth was presented. The use of amorphous substrates allowed the experimentalist to isolate the effects of individual deposition variables on texture development. On both types of substrates, film growth proceeded via a three-dimensional (3D) or Volmer-Weber mode.

Original languageEnglish
JournalJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Volume21
Issue number5
DOIs
Publication statusPublished - Sep 2003

Fingerprint

Microstructural evolution
Film growth
Substrates
textures
Textures

ASJC Scopus subject areas

  • Surfaces, Coatings and Films
  • Surfaces and Interfaces
  • Physics and Astronomy (miscellaneous)
  • Electrical and Electronic Engineering

Cite this

Microstructural evolution during film growth. / Petrov, I.; Barna, P.; Hultman, L.; Greene, J. E.

In: Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, Vol. 21, No. 5, 09.2003.

Research output: Contribution to journalArticle

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