Microstructural evolution during film growth

I. Petrov, P. B. Barna, L. Hultman, J. E. Greene

Research output: Contribution to journalArticle

1156 Citations (Scopus)

Abstract

A report on the microstructural evolution during film growth was presented. The use of amorphous substrates allowed the experimentalist to isolate the effects of individual deposition variables on texture development. On both types of substrates, film growth proceeded via a three-dimensional (3D) or Volmer-Weber mode.

Original languageEnglish
Pages (from-to)S117-S128
JournalJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Volume21
Issue number5
DOIs
Publication statusPublished - Sep 1 2003

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ASJC Scopus subject areas

  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films

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