A report on the microstructural evolution during film growth was presented. The use of amorphous substrates allowed the experimentalist to isolate the effects of individual deposition variables on texture development. On both types of substrates, film growth proceeded via a three-dimensional (3D) or Volmer-Weber mode.
|Journal||Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films|
|Publication status||Published - Sep 1 2003|
ASJC Scopus subject areas
- Condensed Matter Physics
- Surfaces and Interfaces
- Surfaces, Coatings and Films