Mikromechanische Ultraschallwandler für Flüssigkeiten und Gase

Translated title of the contribution: Micromachined Ultrasound Transducers for Fluids and Gases

Kurt Niederer, Peter Christian Eccardt, H. Meixner, Reinhard Lerch

Research output: Contribution to journalArticle

2 Citations (Scopus)

Abstract

With a special micromachining process ultrasound transducers can be realized within a standard CMOS microelectronic process, allowing the monolithic integration of microelectronics and micromechanics on a single chip. The electrostatic transducer is formed by an array of membranes. For air-ultrasonics a bulk-micromachining-process was developed which is best suited for transducers with operating frequencies below 1 MHz.

Original languageGerman
Pages (from-to)212-218
Number of pages7
JournalTechnisches Messen
Volume66
Issue number5
Publication statusPublished - May 1999

Fingerprint

Transducers
transducers
Ultrasonics
Micromachining
micromachining
microelectronics
Microelectronics
Fluids
fluids
Gases
gases
micromechanics
Micromechanics
Electrostatics
CMOS
ultrasonics
chips
electrostatics
membranes
Membranes

ASJC Scopus subject areas

  • Instrumentation

Cite this

Niederer, K., Eccardt, P. C., Meixner, H., & Lerch, R. (1999). Mikromechanische Ultraschallwandler für Flüssigkeiten und Gase. Technisches Messen, 66(5), 212-218.

Mikromechanische Ultraschallwandler für Flüssigkeiten und Gase. / Niederer, Kurt; Eccardt, Peter Christian; Meixner, H.; Lerch, Reinhard.

In: Technisches Messen, Vol. 66, No. 5, 05.1999, p. 212-218.

Research output: Contribution to journalArticle

Niederer, K, Eccardt, PC, Meixner, H & Lerch, R 1999, 'Mikromechanische Ultraschallwandler für Flüssigkeiten und Gase', Technisches Messen, vol. 66, no. 5, pp. 212-218.
Niederer, Kurt ; Eccardt, Peter Christian ; Meixner, H. ; Lerch, Reinhard. / Mikromechanische Ultraschallwandler für Flüssigkeiten und Gase. In: Technisches Messen. 1999 ; Vol. 66, No. 5. pp. 212-218.
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