Mikromechanische Ultraschallwandler für Flüssigkeiten und Gase

Translated title of the contribution: Micromachined Ultrasound Transducers for Fluids and Gases

Kurt Niederer, Peter Christian Eccardt, Hans Meixner, Reinhard Lerch

Research output: Contribution to journalArticle

2 Citations (Scopus)

Abstract

With a special micromachining process ultrasound transducers can be realized within a standard CMOS microelectronic process, allowing the monolithic integration of microelectronics and micromechanics on a single chip. The electrostatic transducer is formed by an array of membranes. For air-ultrasonics a bulk-micromachining-process was developed which is best suited for transducers with operating frequencies below 1 MHz.

Translated title of the contributionMicromachined Ultrasound Transducers for Fluids and Gases
Original languageGerman
Pages (from-to)212-218
Number of pages7
JournalTechnisches Messen
Volume66
Issue number5
Publication statusPublished - May 1 1999

ASJC Scopus subject areas

  • Instrumentation
  • Electrical and Electronic Engineering

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  • Cite this

    Niederer, K., Eccardt, P. C., Meixner, H., & Lerch, R. (1999). Mikromechanische Ultraschallwandler für Flüssigkeiten und Gase. Technisches Messen, 66(5), 212-218.