Abstract
With a special micromachining process ultrasound transducers can be realized within a standard CMOS microelectronic process, allowing the monolithic integration of microelectronics and micromechanics on a single chip. The electrostatic transducer is formed by an array of membranes. For air-ultrasonics a bulk-micromachining-process was developed which is best suited for transducers with operating frequencies below 1 MHz.
| Original language | German |
|---|---|
| Pages (from-to) | 212-218 |
| Number of pages | 7 |
| Journal | Technisches Messen |
| Volume | 66 |
| Issue number | 5 |
| Publication status | Published - May 1999 |
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ASJC Scopus subject areas
- Instrumentation
Cite this
Mikromechanische Ultraschallwandler für Flüssigkeiten und Gase. / Niederer, Kurt; Eccardt, Peter Christian; Meixner, H.; Lerch, Reinhard.
In: Technisches Messen, Vol. 66, No. 5, 05.1999, p. 212-218.Research output: Contribution to journal › Article
}
TY - JOUR
T1 - Mikromechanische Ultraschallwandler für Flüssigkeiten und Gase
AU - Niederer, Kurt
AU - Eccardt, Peter Christian
AU - Meixner, H.
AU - Lerch, Reinhard
PY - 1999/5
Y1 - 1999/5
N2 - With a special micromachining process ultrasound transducers can be realized within a standard CMOS microelectronic process, allowing the monolithic integration of microelectronics and micromechanics on a single chip. The electrostatic transducer is formed by an array of membranes. For air-ultrasonics a bulk-micromachining-process was developed which is best suited for transducers with operating frequencies below 1 MHz.
AB - With a special micromachining process ultrasound transducers can be realized within a standard CMOS microelectronic process, allowing the monolithic integration of microelectronics and micromechanics on a single chip. The electrostatic transducer is formed by an array of membranes. For air-ultrasonics a bulk-micromachining-process was developed which is best suited for transducers with operating frequencies below 1 MHz.
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UR - http://www.scopus.com/inward/citedby.url?scp=0009947648&partnerID=8YFLogxK
M3 - Article
VL - 66
SP - 212
EP - 218
JO - TM. Technisches Messen
JF - TM. Technisches Messen
SN - 0171-8096
IS - 5
ER -