With a special micromachining process ultrasound transducers can be realized within a standard CMOS microelectronic process, allowing the monolithic integration of microelectronics and micromechanics on a single chip. The electrostatic transducer is formed by an array of membranes. For air-ultrasonics a bulk-micromachining-process was developed which is best suited for transducers with operating frequencies below 1 MHz.
|Translated title of the contribution||Micromachined Ultrasound Transducers for Fluids and Gases|
|Number of pages||7|
|Publication status||Published - May 1 1999|
ASJC Scopus subject areas
- Electrical and Electronic Engineering