Abstract
With a special micromachining process ultrasound transducers can be realized within a standard CMOS microelectronic process, allowing the monolithic integration of microelectronics and micromechanics on a single chip. The electrostatic transducer is formed by an array of membranes. For air-ultrasonics a bulk-micromachining-process was developed which is best suited for transducers with operating frequencies below 1 MHz.
| Translated title of the contribution | Micromachined Ultrasound Transducers for Fluids and Gases |
|---|---|
| Original language | German |
| Pages (from-to) | 212-218 |
| Number of pages | 7 |
| Journal | Technisches Messen |
| Volume | 66 |
| Issue number | 5 |
| Publication status | Published - May 1 1999 |
ASJC Scopus subject areas
- Instrumentation
- Electrical and Electronic Engineering
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Cite this
Niederer, K., Eccardt, P. C., Meixner, H., & Lerch, R. (1999). Mikromechanische Ultraschallwandler für Flüssigkeiten und Gase. Technisches Messen, 66(5), 212-218.