Micro-RBS as a technique for the determination of the surface topography of Bi film prepared by pulsed laser deposition

A. Simon, Z. Kántor, I. Rajta, T. Szörényi, A. Kiss

Research output: Contribution to journalArticle

7 Citations (Scopus)

Abstract

Particulate deposition on Bi film prepared by pulsed laser deposition (PLD) was studied by Rutherford backscattering spectrometry (RBS) using a 2 MeV 4He+ scanning microbeam with a lateral resolution of 2 μm. Droplets and particulate-free areas could be detected and separated in the analysis, which offers the possibility of independent measurement of the chemical composition of the thin film and the micron-sized droplets. Tomographic images illustrated thickness inhomogeneities and cross-sectional thickness profile of particulates and gave more detailed information about the surface topography than the RBS spectra themselves. An example is discussed where thicknesses larger than the probing depth could be measured. This unique combination of possibilities makes micro-RBS a powerful technique for the complete analysis of particulate thin films.

Original languageEnglish
Pages (from-to)360-366
Number of pages7
JournalNuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
Volume181
Issue number1-4
DOIs
Publication statusPublished - Jul 2001

Fingerprint

Rutherford backscattering spectroscopy
Surface topography
Pulsed laser deposition
Spectrometry
particulates
pulsed laser deposition
backscattering
topography
spectroscopy
Thin films
microbeams
thin films
Scanning
chemical composition
inhomogeneity
Chemical analysis
scanning
profiles

Keywords

  • Microbeam
  • Particulate formation
  • Pulsed laser deposition
  • Rutherford backscattering spectrometry
  • Surface topography
  • Tomography

ASJC Scopus subject areas

  • Surfaces, Coatings and Films
  • Instrumentation
  • Surfaces and Interfaces

Cite this

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abstract = "Particulate deposition on Bi film prepared by pulsed laser deposition (PLD) was studied by Rutherford backscattering spectrometry (RBS) using a 2 MeV 4He+ scanning microbeam with a lateral resolution of 2 μm. Droplets and particulate-free areas could be detected and separated in the analysis, which offers the possibility of independent measurement of the chemical composition of the thin film and the micron-sized droplets. Tomographic images illustrated thickness inhomogeneities and cross-sectional thickness profile of particulates and gave more detailed information about the surface topography than the RBS spectra themselves. An example is discussed where thicknesses larger than the probing depth could be measured. This unique combination of possibilities makes micro-RBS a powerful technique for the complete analysis of particulate thin films.",
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T1 - Micro-RBS as a technique for the determination of the surface topography of Bi film prepared by pulsed laser deposition

AU - Simon, A.

AU - Kántor, Z.

AU - Rajta, I.

AU - Szörényi, T.

AU - Kiss, A.

PY - 2001/7

Y1 - 2001/7

N2 - Particulate deposition on Bi film prepared by pulsed laser deposition (PLD) was studied by Rutherford backscattering spectrometry (RBS) using a 2 MeV 4He+ scanning microbeam with a lateral resolution of 2 μm. Droplets and particulate-free areas could be detected and separated in the analysis, which offers the possibility of independent measurement of the chemical composition of the thin film and the micron-sized droplets. Tomographic images illustrated thickness inhomogeneities and cross-sectional thickness profile of particulates and gave more detailed information about the surface topography than the RBS spectra themselves. An example is discussed where thicknesses larger than the probing depth could be measured. This unique combination of possibilities makes micro-RBS a powerful technique for the complete analysis of particulate thin films.

AB - Particulate deposition on Bi film prepared by pulsed laser deposition (PLD) was studied by Rutherford backscattering spectrometry (RBS) using a 2 MeV 4He+ scanning microbeam with a lateral resolution of 2 μm. Droplets and particulate-free areas could be detected and separated in the analysis, which offers the possibility of independent measurement of the chemical composition of the thin film and the micron-sized droplets. Tomographic images illustrated thickness inhomogeneities and cross-sectional thickness profile of particulates and gave more detailed information about the surface topography than the RBS spectra themselves. An example is discussed where thicknesses larger than the probing depth could be measured. This unique combination of possibilities makes micro-RBS a powerful technique for the complete analysis of particulate thin films.

KW - Microbeam

KW - Particulate formation

KW - Pulsed laser deposition

KW - Rutherford backscattering spectrometry

KW - Surface topography

KW - Tomography

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