Micro-pellistor with integrated porous alumina catalyst support

F. Biro, A. Pap, I. Bársony, Cs Ducs

Research output: Chapter in Book/Report/Conference proceedingConference contribution

6 Citations (Scopus)

Abstract

Micro-pellistors capable to detect hydrocarbons below 50 mW power consumption at 550 oC operation temperature were developed by a novel processing technique. On the top of the full membrane type micro-heaters 1.4 μm thick porous alumina was formed by laterally selective electrochemical etching of the deposited aluminum layer. The porous alumina of the active element is selectively covered by finely dispersed Pt catalyst using alternative methods; such as dropping of H2[PtCl6] and sputtering technique, all aiming at deposition of controlled volume and structure of the catalyst. Constant current method in a Wheatstone-bridge configuration was applied in functional tests.

Original languageEnglish
Title of host publicationEUROSENSORS 2014, the 28th European Conference on Solid-State Transducers
PublisherElsevier Ltd
Pages200-203
Number of pages4
Volume87
DOIs
Publication statusPublished - 2014
Event28th European Conference on Solid-State Transducers, EUROSENSORS 2014 - Brescia, Italy
Duration: Sep 7 2014Sep 10 2014

Other

Other28th European Conference on Solid-State Transducers, EUROSENSORS 2014
CountryItaly
CityBrescia
Period9/7/149/10/14

Fingerprint

Catalyst supports
Alumina
Electrochemical etching
Catalysts
Chemical elements
Sputtering
Electric power utilization
Hydrocarbons
Membranes
Aluminum
Processing
Temperature

Keywords

  • Micro-hotplate
  • Pellistor
  • Porous alumina

ASJC Scopus subject areas

  • Engineering(all)

Cite this

Biro, F., Pap, A., Bársony, I., & Ducs, C. (2014). Micro-pellistor with integrated porous alumina catalyst support. In EUROSENSORS 2014, the 28th European Conference on Solid-State Transducers (Vol. 87, pp. 200-203). Elsevier Ltd. https://doi.org/10.1016/j.proeng.2014.11.618

Micro-pellistor with integrated porous alumina catalyst support. / Biro, F.; Pap, A.; Bársony, I.; Ducs, Cs.

EUROSENSORS 2014, the 28th European Conference on Solid-State Transducers. Vol. 87 Elsevier Ltd, 2014. p. 200-203.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Biro, F, Pap, A, Bársony, I & Ducs, C 2014, Micro-pellistor with integrated porous alumina catalyst support. in EUROSENSORS 2014, the 28th European Conference on Solid-State Transducers. vol. 87, Elsevier Ltd, pp. 200-203, 28th European Conference on Solid-State Transducers, EUROSENSORS 2014, Brescia, Italy, 9/7/14. https://doi.org/10.1016/j.proeng.2014.11.618
Biro F, Pap A, Bársony I, Ducs C. Micro-pellistor with integrated porous alumina catalyst support. In EUROSENSORS 2014, the 28th European Conference on Solid-State Transducers. Vol. 87. Elsevier Ltd. 2014. p. 200-203 https://doi.org/10.1016/j.proeng.2014.11.618
Biro, F. ; Pap, A. ; Bársony, I. ; Ducs, Cs. / Micro-pellistor with integrated porous alumina catalyst support. EUROSENSORS 2014, the 28th European Conference on Solid-State Transducers. Vol. 87 Elsevier Ltd, 2014. pp. 200-203
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