Micro-hotplates for thermal characterisation of structural materials of MEMS

Research output: Contribution to journalArticle

3 Citations (Scopus)

Abstract

Accurate knowledge of mechanical and thermal properties of structural materials used in MEMS is essential for optimum geometric and functional design. The extraction of precise physical properties is rather complicated due to the size effects, the complexity of the structures and the variations of formation processes. This work is intended to determine the thermal properties of silicon-nitride and diamond layers applied in thermal sensor structures by analysing thermal responses of a multilayer micro-heater structure.

Original languageEnglish
Pages (from-to)1393-1397
Number of pages5
JournalMicroelectronics Journal
Volume40
Issue number9
DOIs
Publication statusPublished - Sep 2009

Keywords

  • Diamond
  • Material properties
  • Micro-heater
  • Silicon-nitride
  • Thermal analysis

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Electrical and Electronic Engineering

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