MEMS testing by vibrating capacitor

J. Mizsei, M. Reggente

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Abstract

The contact free vibrating capacitor method is a valuable tool for investigating the surface potentials of solid surfaces. The purpose of the present article is to summarize the theory and capabilities of the vibrating capacitor method, especially scanning vibrating capacitor pictures in the MEMS testing. After a brief review some results will be discussed, such as equilibrium and non-equilibrium surface potential maps taken from a MEMS resonator, a surface potential map from a cantilever testchip and some maps from a radial-channel micro-cooler plate and heat flux meter. Potential maps contain a lot of information concerning the surface conditions, included the inhomogeneities of the technology, static surface charge, bias and effects of other additional excitations. These potential maps may help in the development, quality control and defect analysis of the MEMS.

Original languageEnglish
Title of host publicationProceedings of the 2007 IEEE Workshop on Design and Diagnostics of Electronic Circuits and Systems, DDECS
Pages429-432
Number of pages4
DOIs
Publication statusPublished - Dec 1 2007
Event2007 IEEE Workshop on Design and Diagnostics of Electronic Circuits and Systems, DDECS - Krakow, Poland
Duration: Apr 11 2007Apr 13 2007

Publication series

NameProceedings of the 2007 IEEE Workshop on Design and Diagnostics of Electronic Circuits and Systems, DDECS

Other

Other2007 IEEE Workshop on Design and Diagnostics of Electronic Circuits and Systems, DDECS
CountryPoland
CityKrakow
Period4/11/074/13/07

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Electrical and Electronic Engineering

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  • Cite this

    Mizsei, J., & Reggente, M. (2007). MEMS testing by vibrating capacitor. In Proceedings of the 2007 IEEE Workshop on Design and Diagnostics of Electronic Circuits and Systems, DDECS (pp. 429-432). [4295324] (Proceedings of the 2007 IEEE Workshop on Design and Diagnostics of Electronic Circuits and Systems, DDECS). https://doi.org/10.1109/DDECS.2007.4295324