Membrane platforms for sensors

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Citations (Scopus)

Abstract

In the past half century the IC technology could produce an unprecedented growth and penetration into all segments of our daily life due to the achieved extreme productivity and reliability by using well established and continuously refined processing platforms. This uninterrupted trend continued also with the advent of the More than Moore-type MEMS technology allowing the combination of the signal processing capability of the mature IC technology with the exploitation of mechanical, thermal, optical properties of the materials used in IC technology in different sensing and actuation purposes. Mass producibility by monolithic integration required here also the development of appropriate unified set of techniques for the various applications, i.e. sort of standardised platforms to explore. In this paper we focus on the development of bulk micromachined membrane platforms, being exploited in such applications. At the same time this summary also offers a "case study", a retrospective review of the development of integrable sensors from pressure measurement to nanopore-type, label-free biosensing at the Institute of Technical Physics & Materials Science - MFA, Budapest.

Original languageEnglish
Title of host publicationEUROSENSORS 2014, the 28th European Conference on Solid-State Transducers
PublisherElsevier Ltd
Pages871-878
Number of pages8
Volume87
DOIs
Publication statusPublished - 2014
Event28th European Conference on Solid-State Transducers, EUROSENSORS 2014 - Brescia, Italy
Duration: Sep 7 2014Sep 10 2014

Other

Other28th European Conference on Solid-State Transducers, EUROSENSORS 2014
CountryItaly
CityBrescia
Period9/7/149/10/14

Fingerprint

Membranes
Sensors
Nanopores
Materials science
Pressure measurement
MEMS
Labels
Signal processing
Physics
Optical properties
Productivity
Processing
Hot Temperature

Keywords

  • Bulk micromachining
  • Membrane
  • MEMS

ASJC Scopus subject areas

  • Engineering(all)

Cite this

Bársony, I., Dücső, C., Fürjes, P., Riesz, F., Hajnal, Z., & Battistig, G. (2014). Membrane platforms for sensors. In EUROSENSORS 2014, the 28th European Conference on Solid-State Transducers (Vol. 87, pp. 871-878). Elsevier Ltd. https://doi.org/10.1016/j.proeng.2014.11.293

Membrane platforms for sensors. / Bársony, I.; Dücső, C.; Fürjes, P.; Riesz, F.; Hajnal, Z.; Battistig, G.

EUROSENSORS 2014, the 28th European Conference on Solid-State Transducers. Vol. 87 Elsevier Ltd, 2014. p. 871-878.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Bársony, I, Dücső, C, Fürjes, P, Riesz, F, Hajnal, Z & Battistig, G 2014, Membrane platforms for sensors. in EUROSENSORS 2014, the 28th European Conference on Solid-State Transducers. vol. 87, Elsevier Ltd, pp. 871-878, 28th European Conference on Solid-State Transducers, EUROSENSORS 2014, Brescia, Italy, 9/7/14. https://doi.org/10.1016/j.proeng.2014.11.293
Bársony I, Dücső C, Fürjes P, Riesz F, Hajnal Z, Battistig G. Membrane platforms for sensors. In EUROSENSORS 2014, the 28th European Conference on Solid-State Transducers. Vol. 87. Elsevier Ltd. 2014. p. 871-878 https://doi.org/10.1016/j.proeng.2014.11.293
Bársony, I. ; Dücső, C. ; Fürjes, P. ; Riesz, F. ; Hajnal, Z. ; Battistig, G. / Membrane platforms for sensors. EUROSENSORS 2014, the 28th European Conference on Solid-State Transducers. Vol. 87 Elsevier Ltd, 2014. pp. 871-878
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