The mechanical properties of antimony doped SnO2 thin films have great importance due to the wide application of these materials. SnO 2 coatings prepared by spray pyrolysis (SP) and chemical vapor deposition (CVD) on a glass substrate have been investigated by nanoindentation for mechanical characterization. The hardness of the layers was found to be dependent on the preparation method, and the adhesion of the layer has an important role in the overall mechanical properties of the coating: the CVD layer adheres much better than the SP coating. The relaxation of nanoindentation impressions of both coatings shows a significantly larger relaxation than the substrate glass. A method was developed for resolving the spatial shape differences between the relaxed hardness indents and the ideal indenter pyramid. It provides a quantitative way to investigate the relaxation characteristic of different materials.
ASJC Scopus subject areas
- Materials Science(all)
- Mechanics of Materials
- Mechanical Engineering
- Industrial and Manufacturing Engineering