Mechanical properties and deformation behavior of ZnO thin films under illumination

Péter Horváth, George Kiriakidis, P. Nagy, Savas Christoulakis

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

As a wide band gap semiconductor with a large exciton binding energy (60 meV), zinc oxide (ZnO) has many existing and promising future applications. The main objective of this work was to study the mechanical properties and deformation behavior of undoped ZnO thin films grown by direct current magnetron sputtering technique in the light of their possible application on SPM cantilevers. Nanoindentation techniques and scratch tests were carried out in order to investigate mechanical properties of a ZnO thickness series deposited under the same sputtering conditions. Nanoindentation measurements were also applied on specific ZnO/Si and ZnO/glass structures in darkness and under illumination utilizing a low power mercury lamp with the aim of understanding the impact of the UV irradiation on the mechanical properties of the ZnO layer.

Original languageEnglish
Title of host publicationProceedings of the 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2007
Pages421-425
Number of pages5
DOIs
Publication statusPublished - 2007
Event2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2007 - Bangkok, Thailand
Duration: Jan 16 2007Jan 19 2007

Other

Other2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2007
CountryThailand
CityBangkok
Period1/16/071/19/07

Fingerprint

Zinc oxide
Oxide films
Lighting
Thin films
Mechanical properties
Nanoindentation
Mercury vapor lamps
Binding energy
Excitons
Magnetron sputtering
Sputtering
Irradiation
Glass

Keywords

  • Nanoindentation
  • Photoplastic effect
  • Scratch tect
  • ZnO

ASJC Scopus subject areas

  • Computer Networks and Communications
  • Computer Science Applications
  • Electrical and Electronic Engineering

Cite this

Horváth, P., Kiriakidis, G., Nagy, P., & Christoulakis, S. (2007). Mechanical properties and deformation behavior of ZnO thin films under illumination. In Proceedings of the 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2007 (pp. 421-425). [4160353] https://doi.org/10.1109/NEMS.2007.352050

Mechanical properties and deformation behavior of ZnO thin films under illumination. / Horváth, Péter; Kiriakidis, George; Nagy, P.; Christoulakis, Savas.

Proceedings of the 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2007. 2007. p. 421-425 4160353.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Horváth, P, Kiriakidis, G, Nagy, P & Christoulakis, S 2007, Mechanical properties and deformation behavior of ZnO thin films under illumination. in Proceedings of the 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2007., 4160353, pp. 421-425, 2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2007, Bangkok, Thailand, 1/16/07. https://doi.org/10.1109/NEMS.2007.352050
Horváth P, Kiriakidis G, Nagy P, Christoulakis S. Mechanical properties and deformation behavior of ZnO thin films under illumination. In Proceedings of the 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2007. 2007. p. 421-425. 4160353 https://doi.org/10.1109/NEMS.2007.352050
Horváth, Péter ; Kiriakidis, George ; Nagy, P. ; Christoulakis, Savas. / Mechanical properties and deformation behavior of ZnO thin films under illumination. Proceedings of the 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2007. 2007. pp. 421-425
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