Makyoh topography study of the curvature and surface morphology of mismatched InGaAs/GaAs heterostructures

Á Nemcsics, F. Riesz, J. Szabó, Z. E. Horváth, S. Gurbán

Research output: Contribution to journalConference article

7 Citations (Scopus)

Abstract

The curvature and surface morphology of lattice-mismatched InGaAs/GaAs heteroepitaxial layers are studied by Makyoh (magic-mirror) topography. The results are compared to X-ray topography curvature measurements and theoretical considerations based on misfit relaxation models. The deviations suggest additional stresses, probably due to substrate effects, correlated with rough surface morphology.

Original languageEnglish
Pages (from-to)231-236
Number of pages6
JournalPhysica Status Solidi (A) Applied Research
Volume177
Issue number1
DOIs
Publication statusPublished - Jan 1 2000
EventThe 216. WE-Heraeus Seminar on Nitrogen in Solids and at Solid Surfaces: Present Status and Future Trends - Ilmenau, Ger
Duration: May 30 1999Jun 2 1999

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics

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