Makyoh-topography study of grooves scratched and etched in single-crystal semiconductors

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Abstract

A Makyoh-topography study of grooves scribed and etched in semiconductor wafers is presented. It is shown that scribing induces singular deformation of the wafer; the Makyoh image results in as an overlap or shifting aside of the images of the surface areas separated by the scratch. Etching does not induce any stress; the Makyoh image is a diffraction pattern of the etched groove. Possibilities of the use of Makyoh for detecting scratches in mirror-like surfaces are discussed.

Original languageEnglish
Pages (from-to)291-295
Number of pages5
JournalMaterials Letters
Volume46
Issue number5
DOIs
Publication statusPublished - Dec 2000

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ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

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