Makyoh-topography study of grooves scratched and etched in single-crystal semiconductors

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4 Citations (Scopus)

Abstract

A Makyoh-topography study of grooves scribed and etched in semiconductor wafers is presented. It is shown that scribing induces singular deformation of the wafer; the Makyoh image results in as an overlap or shifting aside of the images of the surface areas separated by the scratch. Etching does not induce any stress; the Makyoh image is a diffraction pattern of the etched groove. Possibilities of the use of Makyoh for detecting scratches in mirror-like surfaces are discussed.

Original languageEnglish
Pages (from-to)291-295
Number of pages5
JournalMaterials Letters
Volume46
Issue number5
DOIs
Publication statusPublished - Dec 2000

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grooves
Topography
topography
Single crystals
Semiconductor materials
single crystals
wafers
Diffraction patterns
Etching
Mirrors
scoring
diffraction patterns
etching
mirrors

ASJC Scopus subject areas

  • Materials Science(all)

Cite this

Makyoh-topography study of grooves scratched and etched in single-crystal semiconductors. / Riesz, F.

In: Materials Letters, Vol. 46, No. 5, 12.2000, p. 291-295.

Research output: Contribution to journalArticle

@article{8ba229dbdb0e49cebf47d42fa1f62779,
title = "Makyoh-topography study of grooves scratched and etched in single-crystal semiconductors",
abstract = "A Makyoh-topography study of grooves scribed and etched in semiconductor wafers is presented. It is shown that scribing induces singular deformation of the wafer; the Makyoh image results in as an overlap or shifting aside of the images of the surface areas separated by the scratch. Etching does not induce any stress; the Makyoh image is a diffraction pattern of the etched groove. Possibilities of the use of Makyoh for detecting scratches in mirror-like surfaces are discussed.",
author = "F. Riesz",
year = "2000",
month = "12",
doi = "10.1016/S0167-577X(00)00190-7",
language = "English",
volume = "46",
pages = "291--295",
journal = "Materials Letters",
issn = "0167-577X",
publisher = "Elsevier",
number = "5",

}

TY - JOUR

T1 - Makyoh-topography study of grooves scratched and etched in single-crystal semiconductors

AU - Riesz, F.

PY - 2000/12

Y1 - 2000/12

N2 - A Makyoh-topography study of grooves scribed and etched in semiconductor wafers is presented. It is shown that scribing induces singular deformation of the wafer; the Makyoh image results in as an overlap or shifting aside of the images of the surface areas separated by the scratch. Etching does not induce any stress; the Makyoh image is a diffraction pattern of the etched groove. Possibilities of the use of Makyoh for detecting scratches in mirror-like surfaces are discussed.

AB - A Makyoh-topography study of grooves scribed and etched in semiconductor wafers is presented. It is shown that scribing induces singular deformation of the wafer; the Makyoh image results in as an overlap or shifting aside of the images of the surface areas separated by the scratch. Etching does not induce any stress; the Makyoh image is a diffraction pattern of the etched groove. Possibilities of the use of Makyoh for detecting scratches in mirror-like surfaces are discussed.

UR - http://www.scopus.com/inward/record.url?scp=0034515084&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0034515084&partnerID=8YFLogxK

U2 - 10.1016/S0167-577X(00)00190-7

DO - 10.1016/S0167-577X(00)00190-7

M3 - Article

AN - SCOPUS:0034515084

VL - 46

SP - 291

EP - 295

JO - Materials Letters

JF - Materials Letters

SN - 0167-577X

IS - 5

ER -