A new method is developed for the measurement of the radii of curvature R of mirror-like semiconductor wafers using the magic-mirror (Makyoh) method. A flat mirror is placed beneath the sample, thus a second, 'contour' image of the sample is formed beside the sample image itself. From the size deviation of the two images that results from the curvature of the sample, R can be calculated. Experimental results obtained with mirrors with known curvature show good agreement with the calculations. Implications for the general image formation mechanism are discussed as well.
|Journal||Japanese Journal of Applied Physics, Part 2: Letters|
|Issue number||2 B|
|Publication status||Published - Jan 1 1996|
ASJC Scopus subject areas
- Physics and Astronomy (miscellaneous)
- Physics and Astronomy(all)