Makyoh topography

curvature measurements and implications for the image formation

P. Szabó, F. Riesz, Bela Szentpali

Research output: Contribution to journalArticle

14 Citations (Scopus)

Abstract

A new method is developed for the measurement of the radii of curvature R of mirror-like semiconductor wafers using the magic-mirror (Makyoh) method. A flat mirror is placed beneath the sample, thus a second, 'contour' image of the sample is formed beside the sample image itself. From the size deviation of the two images that results from the curvature of the sample, R can be calculated. Experimental results obtained with mirrors with known curvature show good agreement with the calculations. Implications for the general image formation mechanism are discussed as well.

Original languageEnglish
JournalJapanese Journal of Applied Physics, Part 2: Letters
Volume35
Issue number2 B
Publication statusPublished - 1996

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Topography
topography
Mirrors
Image processing
curvature
mirrors
Semiconductor materials
wafers
deviation
radii

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

Cite this

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abstract = "A new method is developed for the measurement of the radii of curvature R of mirror-like semiconductor wafers using the magic-mirror (Makyoh) method. A flat mirror is placed beneath the sample, thus a second, 'contour' image of the sample is formed beside the sample image itself. From the size deviation of the two images that results from the curvature of the sample, R can be calculated. Experimental results obtained with mirrors with known curvature show good agreement with the calculations. Implications for the general image formation mechanism are discussed as well.",
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AU - Riesz, F.

AU - Szentpali, Bela

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N2 - A new method is developed for the measurement of the radii of curvature R of mirror-like semiconductor wafers using the magic-mirror (Makyoh) method. A flat mirror is placed beneath the sample, thus a second, 'contour' image of the sample is formed beside the sample image itself. From the size deviation of the two images that results from the curvature of the sample, R can be calculated. Experimental results obtained with mirrors with known curvature show good agreement with the calculations. Implications for the general image formation mechanism are discussed as well.

AB - A new method is developed for the measurement of the radii of curvature R of mirror-like semiconductor wafers using the magic-mirror (Makyoh) method. A flat mirror is placed beneath the sample, thus a second, 'contour' image of the sample is formed beside the sample image itself. From the size deviation of the two images that results from the curvature of the sample, R can be calculated. Experimental results obtained with mirrors with known curvature show good agreement with the calculations. Implications for the general image formation mechanism are discussed as well.

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