Makyoh topography: A simple yet powerful optical method for surface flatness and defect characterisation

Research output: Contribution to journalArticle

1 Citation (Scopus)

Abstract

Makyoh topography is an optical surface defect and flatness characterisation tool. The operation principle is based on the whole-sample reflection of a collimated beam and defocused detection. The paper reviews the history, the basic principles and applications of the method. The problem of quantitativity is discussed in detail and the solutions are described. Comparison is made to related optical and other topographic techniques.

Original languageEnglish
Pages (from-to)51-61
Number of pages11
JournalDefect and Diffusion Forum
Volume221-223
Publication statusPublished - 2003

Fingerprint

Surface defects
flatness
Topography
topography
optics
Defects
defects
surface defects
histories

Keywords

  • Markyoh tomography
  • Optical characterisation techniques
  • Surface defects
  • Surface flatness
  • Surface morphology

ASJC Scopus subject areas

  • Metals and Alloys

Cite this

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abstract = "Makyoh topography is an optical surface defect and flatness characterisation tool. The operation principle is based on the whole-sample reflection of a collimated beam and defocused detection. The paper reviews the history, the basic principles and applications of the method. The problem of quantitativity is discussed in detail and the solutions are described. Comparison is made to related optical and other topographic techniques.",
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