Low-temperature growth of multi-walled carbon nanotubes by thermal CVD

Niina Halonen, András Sápi, L. Nagymajtényi, Róbert Puskás, Anne Riikka Leino, Jani Mäklin, Jarmo Kukkola, Geza Tóth, Ming Chung Wu, Hsueh Chung Liao, Wei Fang Su, Andrey Shchukarev, Jyri Pekka Mikkola, Á. Kukovecz, Z. Kónya, Krisztián Kordás

Research output: Contribution to journalArticle

16 Citations (Scopus)

Abstract

Low-temperature thermal chemical vapor deposition (thermal CVD) synthesis of multi-walled carbon nanotubes (MWCNTs) was studied using a large variety of different precursor compounds. Cyclopentene oxide, tetrahydrofuran, methanol, and xylene:methanol mixture as oxygen containing heteroatomic precursors, while xylene and acetylene as conventional hydrocarbon feedstocks were applied in the experiments. The catalytic activity of Co, Fe, Ni, and their bi- as well as tri-metallic combinations were tested for the reactions. Low-temperature CNT growth occurred at 400 °C when using bi-metallic Co-Fe and tri-metallic Ni-Co-Fe catalyst (on alumina) and methanol or acetylene as precursors. In the case of monometallic catalyst nanoparticles, only Co (both on alumina and on silica) was found to be active in the low temperature growth (below 500 °C) from oxygenates such as cyclopentene oxide and methanol. The structure and composition of the achieved MWCNTs products were studied by scanning and transmission electron microscopy (SEM and TEM) as well as by Raman and X-ray photoelectron spectroscopy (XPS) and by X-ray diffraction (XRD). The successful MWCNT growth below 500 °C is promising from the point of view of integrating MWCNT materials into existing IC fabrication technologies.

Original languageEnglish
Pages (from-to)2500-2503
Number of pages4
JournalPhysica Status Solidi (B) Basic Research
Volume248
Issue number11
DOIs
Publication statusPublished - Nov 2011

Fingerprint

Carbon Nanotubes
Growth temperature
Methanol
Chemical vapor deposition
Carbon nanotubes
carbon nanotubes
vapor deposition
Cyclopentanes
Acetylene
Xylenes
methyl alcohol
Aluminum Oxide
Xylene
Oxides
xylene
Alumina
acetylene
Transmission electron microscopy
aluminum oxides
Scanning electron microscopy

Keywords

  • Low-temperature CNT growth
  • Thermal CVD

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Electronic, Optical and Magnetic Materials

Cite this

Halonen, N., Sápi, A., Nagymajtényi, L., Puskás, R., Leino, A. R., Mäklin, J., ... Kordás, K. (2011). Low-temperature growth of multi-walled carbon nanotubes by thermal CVD. Physica Status Solidi (B) Basic Research, 248(11), 2500-2503. https://doi.org/10.1002/pssb.201100137

Low-temperature growth of multi-walled carbon nanotubes by thermal CVD. / Halonen, Niina; Sápi, András; Nagymajtényi, L.; Puskás, Róbert; Leino, Anne Riikka; Mäklin, Jani; Kukkola, Jarmo; Tóth, Geza; Wu, Ming Chung; Liao, Hsueh Chung; Su, Wei Fang; Shchukarev, Andrey; Mikkola, Jyri Pekka; Kukovecz, Á.; Kónya, Z.; Kordás, Krisztián.

In: Physica Status Solidi (B) Basic Research, Vol. 248, No. 11, 11.2011, p. 2500-2503.

Research output: Contribution to journalArticle

Halonen, N, Sápi, A, Nagymajtényi, L, Puskás, R, Leino, AR, Mäklin, J, Kukkola, J, Tóth, G, Wu, MC, Liao, HC, Su, WF, Shchukarev, A, Mikkola, JP, Kukovecz, Á, Kónya, Z & Kordás, K 2011, 'Low-temperature growth of multi-walled carbon nanotubes by thermal CVD', Physica Status Solidi (B) Basic Research, vol. 248, no. 11, pp. 2500-2503. https://doi.org/10.1002/pssb.201100137
Halonen, Niina ; Sápi, András ; Nagymajtényi, L. ; Puskás, Róbert ; Leino, Anne Riikka ; Mäklin, Jani ; Kukkola, Jarmo ; Tóth, Geza ; Wu, Ming Chung ; Liao, Hsueh Chung ; Su, Wei Fang ; Shchukarev, Andrey ; Mikkola, Jyri Pekka ; Kukovecz, Á. ; Kónya, Z. ; Kordás, Krisztián. / Low-temperature growth of multi-walled carbon nanotubes by thermal CVD. In: Physica Status Solidi (B) Basic Research. 2011 ; Vol. 248, No. 11. pp. 2500-2503.
@article{8b0e4a3c896e4bb2ac45fe695a0d59a2,
title = "Low-temperature growth of multi-walled carbon nanotubes by thermal CVD",
abstract = "Low-temperature thermal chemical vapor deposition (thermal CVD) synthesis of multi-walled carbon nanotubes (MWCNTs) was studied using a large variety of different precursor compounds. Cyclopentene oxide, tetrahydrofuran, methanol, and xylene:methanol mixture as oxygen containing heteroatomic precursors, while xylene and acetylene as conventional hydrocarbon feedstocks were applied in the experiments. The catalytic activity of Co, Fe, Ni, and their bi- as well as tri-metallic combinations were tested for the reactions. Low-temperature CNT growth occurred at 400 °C when using bi-metallic Co-Fe and tri-metallic Ni-Co-Fe catalyst (on alumina) and methanol or acetylene as precursors. In the case of monometallic catalyst nanoparticles, only Co (both on alumina and on silica) was found to be active in the low temperature growth (below 500 °C) from oxygenates such as cyclopentene oxide and methanol. The structure and composition of the achieved MWCNTs products were studied by scanning and transmission electron microscopy (SEM and TEM) as well as by Raman and X-ray photoelectron spectroscopy (XPS) and by X-ray diffraction (XRD). The successful MWCNT growth below 500 °C is promising from the point of view of integrating MWCNT materials into existing IC fabrication technologies.",
keywords = "Low-temperature CNT growth, Thermal CVD",
author = "Niina Halonen and Andr{\'a}s S{\'a}pi and L. Nagymajt{\'e}nyi and R{\'o}bert Pusk{\'a}s and Leino, {Anne Riikka} and Jani M{\"a}klin and Jarmo Kukkola and Geza T{\'o}th and Wu, {Ming Chung} and Liao, {Hsueh Chung} and Su, {Wei Fang} and Andrey Shchukarev and Mikkola, {Jyri Pekka} and {\'A}. Kukovecz and Z. K{\'o}nya and Kriszti{\'a}n Kord{\'a}s",
year = "2011",
month = "11",
doi = "10.1002/pssb.201100137",
language = "English",
volume = "248",
pages = "2500--2503",
journal = "Physica Status Solidi (B): Basic Research",
issn = "0370-1972",
publisher = "Wiley-VCH Verlag",
number = "11",

}

TY - JOUR

T1 - Low-temperature growth of multi-walled carbon nanotubes by thermal CVD

AU - Halonen, Niina

AU - Sápi, András

AU - Nagymajtényi, L.

AU - Puskás, Róbert

AU - Leino, Anne Riikka

AU - Mäklin, Jani

AU - Kukkola, Jarmo

AU - Tóth, Geza

AU - Wu, Ming Chung

AU - Liao, Hsueh Chung

AU - Su, Wei Fang

AU - Shchukarev, Andrey

AU - Mikkola, Jyri Pekka

AU - Kukovecz, Á.

AU - Kónya, Z.

AU - Kordás, Krisztián

PY - 2011/11

Y1 - 2011/11

N2 - Low-temperature thermal chemical vapor deposition (thermal CVD) synthesis of multi-walled carbon nanotubes (MWCNTs) was studied using a large variety of different precursor compounds. Cyclopentene oxide, tetrahydrofuran, methanol, and xylene:methanol mixture as oxygen containing heteroatomic precursors, while xylene and acetylene as conventional hydrocarbon feedstocks were applied in the experiments. The catalytic activity of Co, Fe, Ni, and their bi- as well as tri-metallic combinations were tested for the reactions. Low-temperature CNT growth occurred at 400 °C when using bi-metallic Co-Fe and tri-metallic Ni-Co-Fe catalyst (on alumina) and methanol or acetylene as precursors. In the case of monometallic catalyst nanoparticles, only Co (both on alumina and on silica) was found to be active in the low temperature growth (below 500 °C) from oxygenates such as cyclopentene oxide and methanol. The structure and composition of the achieved MWCNTs products were studied by scanning and transmission electron microscopy (SEM and TEM) as well as by Raman and X-ray photoelectron spectroscopy (XPS) and by X-ray diffraction (XRD). The successful MWCNT growth below 500 °C is promising from the point of view of integrating MWCNT materials into existing IC fabrication technologies.

AB - Low-temperature thermal chemical vapor deposition (thermal CVD) synthesis of multi-walled carbon nanotubes (MWCNTs) was studied using a large variety of different precursor compounds. Cyclopentene oxide, tetrahydrofuran, methanol, and xylene:methanol mixture as oxygen containing heteroatomic precursors, while xylene and acetylene as conventional hydrocarbon feedstocks were applied in the experiments. The catalytic activity of Co, Fe, Ni, and their bi- as well as tri-metallic combinations were tested for the reactions. Low-temperature CNT growth occurred at 400 °C when using bi-metallic Co-Fe and tri-metallic Ni-Co-Fe catalyst (on alumina) and methanol or acetylene as precursors. In the case of monometallic catalyst nanoparticles, only Co (both on alumina and on silica) was found to be active in the low temperature growth (below 500 °C) from oxygenates such as cyclopentene oxide and methanol. The structure and composition of the achieved MWCNTs products were studied by scanning and transmission electron microscopy (SEM and TEM) as well as by Raman and X-ray photoelectron spectroscopy (XPS) and by X-ray diffraction (XRD). The successful MWCNT growth below 500 °C is promising from the point of view of integrating MWCNT materials into existing IC fabrication technologies.

KW - Low-temperature CNT growth

KW - Thermal CVD

UR - http://www.scopus.com/inward/record.url?scp=84862982506&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84862982506&partnerID=8YFLogxK

U2 - 10.1002/pssb.201100137

DO - 10.1002/pssb.201100137

M3 - Article

AN - SCOPUS:84862982506

VL - 248

SP - 2500

EP - 2503

JO - Physica Status Solidi (B): Basic Research

JF - Physica Status Solidi (B): Basic Research

SN - 0370-1972

IS - 11

ER -