Low-power gas sensors based on work-function measurement in low-cost hybrid flip-chip technology

M. Fleischer, B. Ostrick, R. Pohle, E. Simon, H. Meixner, C. Bilger, F. Daeche

Research output: Contribution to journalArticle

22 Citations (Scopus)

Abstract

To implement low-power gas sensors with low component costs, the principle of work-function read out via a hybrid suspended gate FET (SGFET) is being pursued, whereby a freely selectable sensor film undergoes a reversible work-function change corresponding to the build-up of a potential difference on the surface in response to gas adsorption/reaction. This is read out via an ISFET structure. An innovative design which allows cheap manufacturing will be described for the principle that has already been successfully demonstrated. The starting point of the design is a ceramic Al2O3 substrate coated with conductor patterns and sensitive materials onto which the FET is mounted in flip-chip technology. By means of the freely selectable sensor film and its preparation method, a wide range of applications can be opened up.

Original languageEnglish
Pages (from-to)169-173
Number of pages5
JournalSensors and Actuators, B: Chemical
Volume80
Issue number3
DOIs
Publication statusPublished - Dec 1 2001

Fingerprint

Field effect transistors
Chemical sensors
chips
Ion sensitive field effect transistors
Gas adsorption
sensors
Sensors
field effect transistors
gases
Costs
Substrates
manufacturing
conductors
ceramics
costs
preparation
adsorption

Keywords

  • Flip-chip technology
  • Gas sensor
  • Low-power
  • SGFET
  • Work-function measurement

ASJC Scopus subject areas

  • Analytical Chemistry
  • Electrochemistry
  • Electrical and Electronic Engineering

Cite this

Low-power gas sensors based on work-function measurement in low-cost hybrid flip-chip technology. / Fleischer, M.; Ostrick, B.; Pohle, R.; Simon, E.; Meixner, H.; Bilger, C.; Daeche, F.

In: Sensors and Actuators, B: Chemical, Vol. 80, No. 3, 01.12.2001, p. 169-173.

Research output: Contribution to journalArticle

Fleischer, M. ; Ostrick, B. ; Pohle, R. ; Simon, E. ; Meixner, H. ; Bilger, C. ; Daeche, F. / Low-power gas sensors based on work-function measurement in low-cost hybrid flip-chip technology. In: Sensors and Actuators, B: Chemical. 2001 ; Vol. 80, No. 3. pp. 169-173.
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