We have developed an electron cyclotron resonance ion source apparatus, which is designed for the production of endohedral fullerene. In this study, we irradiated the Fe+ beam to the C60 thin film. We changed the experimental condition of the dose and the ion energy. We could observe the Fe + C60 peak by analysis of the time-of-flight mass spectrometry. The highest intensity of the Fe + C60 peak was observed at the ion energy of 200 eV. The Fe + C60 peak intensity tended to become high in the case of long irradiation time and large dose.
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