Liquid phase epitaxy of AlGaInSb

E. Lendvay, V. A. Gevorkyan, L. Petrás, I. Pozsgai, T. Görög, A. Tóth

Research output: Contribution to journalArticle

1 Citation (Scopus)

Abstract

Epitaxial growth of the AlGaInSb pseudo-ternary on GaAs, GaSb and InSb substrates was investigated. The LPE growth was performed using In- and Ga-rich melts and different growth parameters such as cooling rate, supercooling, etc. The heteroepitaxial systems were evaluated by several methods; the growth morphologies and layer thickness were investigated by scanning electron microscopy, the composition of the quaternary was determined by X-ray microanalysis using both energy and wavelength dispersive analysis, and the lattice matching and layer perfection were analysed using X-ray rocking curves. It was demonstrated that good quality AlGaInSb epitaxial layers and p-n junctions were formed using In-rich melts and GaSb substrates.

Original languageEnglish
Pages (from-to)63-72
Number of pages10
JournalJournal of Crystal Growth
Volume73
Issue number1
DOIs
Publication statusPublished - 1985

Fingerprint

Liquid phase epitaxy
liquid phase epitaxy
X rays
Supercooling
Epitaxial layers
Microanalysis
Substrates
Epitaxial growth
supercooling
p-n junctions
microanalysis
Cooling
Wavelength
Scanning electron microscopy
x rays
Chemical analysis
cooling
scanning electron microscopy
curves
wavelengths

ASJC Scopus subject areas

  • Condensed Matter Physics

Cite this

Lendvay, E., Gevorkyan, V. A., Petrás, L., Pozsgai, I., Görög, T., & Tóth, A. (1985). Liquid phase epitaxy of AlGaInSb. Journal of Crystal Growth, 73(1), 63-72. https://doi.org/10.1016/0022-0248(85)90331-8

Liquid phase epitaxy of AlGaInSb. / Lendvay, E.; Gevorkyan, V. A.; Petrás, L.; Pozsgai, I.; Görög, T.; Tóth, A.

In: Journal of Crystal Growth, Vol. 73, No. 1, 1985, p. 63-72.

Research output: Contribution to journalArticle

Lendvay, E, Gevorkyan, VA, Petrás, L, Pozsgai, I, Görög, T & Tóth, A 1985, 'Liquid phase epitaxy of AlGaInSb', Journal of Crystal Growth, vol. 73, no. 1, pp. 63-72. https://doi.org/10.1016/0022-0248(85)90331-8
Lendvay E, Gevorkyan VA, Petrás L, Pozsgai I, Görög T, Tóth A. Liquid phase epitaxy of AlGaInSb. Journal of Crystal Growth. 1985;73(1):63-72. https://doi.org/10.1016/0022-0248(85)90331-8
Lendvay, E. ; Gevorkyan, V. A. ; Petrás, L. ; Pozsgai, I. ; Görög, T. ; Tóth, A. / Liquid phase epitaxy of AlGaInSb. In: Journal of Crystal Growth. 1985 ; Vol. 73, No. 1. pp. 63-72.
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