LCVD of tungsten microstructures on quartz

Z. Toth, P. Kargl, C. Grivas, K. Piglmayer, T. Szörenyi, D. Bäuerle

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Abstract

The pyrolytic laser-induced chemical vapor deposition (LCVD) of tungsten microstructures in the form of spots has been investigated. Fused quartz substrates and a mixture of WF6 and H2 have been employed in the experiments. Different shapes of spots related to different partial pressures of WF6 and H2 have been revealed. The results can qualitatively be described by a combination of surface reactions and gas-phase reactions resulting in tungsten deposition and surface etching.

Original languageEnglish
Pages (from-to)189-192
Number of pages4
JournalApplied Physics B Photophysics and Laser Chemistry
Volume54
Issue number3
DOIs
Publication statusPublished - Mar 1 1992

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Keywords

  • 42.60
  • 81.15
  • 82.00

ASJC Scopus subject areas

  • Engineering(all)

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