LCVD of tungsten microstructures on quartz

Z. Tóth, P. Kargl, C. Grivas, K. Piglmayer, T. Szörényi, D. Bäuerle

Research output: Contribution to journalArticle

8 Citations (Scopus)

Abstract

The pyrolytic laser-induced chemical vapor deposition (LCVD) of tungsten microstructures in the form of spots has been investigated. Fused quartz substrates and a mixture of WF6 and H2 have been employed in the experiments. Different shapes of spots related to different partial pressures of WF6 and H2 have been revealed. The results can qualitatively be described by a combination of surface reactions and gas-phase reactions resulting in tungsten deposition and surface etching.

Original languageEnglish
Pages (from-to)189-192
Number of pages4
JournalApplied Physics B Photophysics and Laser Chemistry
Volume54
Issue number3
DOIs
Publication statusPublished - Mar 1992

Fingerprint

Tungsten
Quartz
Chemical vapor deposition
tungsten
quartz
vapor deposition
microstructure
Microstructure
Lasers
Surface reactions
Partial pressure
surface reactions
lasers
partial pressure
Etching
etching
vapor phases
Substrates
Gases
Experiments

Keywords

  • 42.60
  • 81.15
  • 82.00

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics
  • Physics and Astronomy (miscellaneous)

Cite this

LCVD of tungsten microstructures on quartz. / Tóth, Z.; Kargl, P.; Grivas, C.; Piglmayer, K.; Szörényi, T.; Bäuerle, D.

In: Applied Physics B Photophysics and Laser Chemistry, Vol. 54, No. 3, 03.1992, p. 189-192.

Research output: Contribution to journalArticle

Tóth, Z. ; Kargl, P. ; Grivas, C. ; Piglmayer, K. ; Szörényi, T. ; Bäuerle, D. / LCVD of tungsten microstructures on quartz. In: Applied Physics B Photophysics and Laser Chemistry. 1992 ; Vol. 54, No. 3. pp. 189-192.
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