The pyrolytic laser-induced chemical vapor deposition (LCVD) of tungsten microstructures in the form of spots has been investigated. Fused quartz substrates and a mixture of WF6 and H2 have been employed in the experiments. Different shapes of spots related to different partial pressures of WF6 and H2 have been revealed. The results can qualitatively be described by a combination of surface reactions and gas-phase reactions resulting in tungsten deposition and surface etching.
|Number of pages||4|
|Journal||Applied Physics B Photophysics and Laser Chemistry|
|Publication status||Published - Mar 1 1992|
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