Lattice curvature of InxGa1-xAs/GaAs [001] graded buffer layers

F. Romanato, M. Natali, E. Napolitani, A. V. Drigo, A. Bosacchi, C. Ferrari, S. Franchi, G. Salviati

Research output: Contribution to journalArticle

4 Citations (Scopus)

Abstract

Ion channeling analysis and x-ray diffraction reciprocal space maps have been performed on InxGa1-xAs buffer layers grown with different composition profiles on well-cut (001) GaAs substrates. On all of the samples analyzed we detect a curvature of the layer lattice, i.e., a tilt of the lattice with respect to the substrate which varies coherently along the sample surface. The layer tilt is directed inward defining a curvature that is concave, large (up to 2.5° cm-1) and that decreases when approaching the substrate. We describe this new phenomenon in terms of a coherent lateral distribution of the orientations of the misfit dislocation Burgers' vectors.

Original languageEnglish
Pages (from-to)3578-3881
Number of pages304
JournalJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Volume16
Issue number6
Publication statusPublished - Nov 1998

Fingerprint

Buffer layers
buffers
curvature
Substrates
Burgers vector
Dislocations (crystals)
Crystal orientation
x ray diffraction
Diffraction
Ions
X rays
profiles
Chemical analysis
gallium arsenide
ions

ASJC Scopus subject areas

  • Surfaces, Coatings and Films
  • Physics and Astronomy (miscellaneous)
  • Surfaces and Interfaces

Cite this

Romanato, F., Natali, M., Napolitani, E., Drigo, A. V., Bosacchi, A., Ferrari, C., ... Salviati, G. (1998). Lattice curvature of InxGa1-xAs/GaAs [001] graded buffer layers. Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, 16(6), 3578-3881.

Lattice curvature of InxGa1-xAs/GaAs [001] graded buffer layers. / Romanato, F.; Natali, M.; Napolitani, E.; Drigo, A. V.; Bosacchi, A.; Ferrari, C.; Franchi, S.; Salviati, G.

In: Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, Vol. 16, No. 6, 11.1998, p. 3578-3881.

Research output: Contribution to journalArticle

Romanato, F, Natali, M, Napolitani, E, Drigo, AV, Bosacchi, A, Ferrari, C, Franchi, S & Salviati, G 1998, 'Lattice curvature of InxGa1-xAs/GaAs [001] graded buffer layers', Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, vol. 16, no. 6, pp. 3578-3881.
Romanato, F. ; Natali, M. ; Napolitani, E. ; Drigo, A. V. ; Bosacchi, A. ; Ferrari, C. ; Franchi, S. ; Salviati, G. / Lattice curvature of InxGa1-xAs/GaAs [001] graded buffer layers. In: Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films. 1998 ; Vol. 16, No. 6. pp. 3578-3881.
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