Laser micromachining projection microscope

K. Osvay, Z. Bor, B. Racz, J. Heitz, I. N. Ross

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

A new excimer laser micromachining projection microscope is described. This device enables a surface to be viewed at high magnification with a built-in facility for micromachining of the same surface according to a predetermined pattern. The advantage of such a technique for both pattern generation, surface cleaning and mask correction is demonstrated on Al, Cu and W specimens with a spatial resolution better than 3 μm.

Original languageEnglish
Title of host publicationOptics as a Key to High Technology
EditorsGy Akos, T. Lippenyi, G. Lupkovics, A. Podmaniczky
PublisherPubl by Society of Photo-Optical Instrumentation Engineers
Pages751-752
Number of pages2
Editionpt 2
ISBN (Print)0819412309
Publication statusPublished - Dec 1 1993
EventProceedings of the 16th Congress of the International Commission for Optics - Budapest, Hung
Duration: Aug 9 1993Aug 13 1993

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Numberpt 2
Volume1983
ISSN (Print)0277-786X

Other

OtherProceedings of the 16th Congress of the International Commission for Optics
CityBudapest, Hung
Period8/9/938/13/93

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ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

Cite this

Osvay, K., Bor, Z., Racz, B., Heitz, J., & Ross, I. N. (1993). Laser micromachining projection microscope. In G. Akos, T. Lippenyi, G. Lupkovics, & A. Podmaniczky (Eds.), Optics as a Key to High Technology (pt 2 ed., pp. 751-752). (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 1983, No. pt 2). Publ by Society of Photo-Optical Instrumentation Engineers.