Tantalum pentoxide layers were prepared by laser assisted oxidation using a CW-YAG ( λ =1.06 μm) laser. The activation energy (124.7 kJ/mole) and the oxidation constant (7.57×10-15 cm2/s) were determined by a computing system. Laser oxidation data have been compared with those determined for isothermal oxidation carried out in a furnace.
|Number of pages||4|
|Journal||Spectrochimica Acta Part A: Molecular Spectroscopy|
|Publication status||Published - 1990|
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