Laser-induced surface modification on LTCC materials for chemical metallization

K. Kordás, A. Pap, J. Saavalainen, H. Jantunen, P. Moilanen, E. Haapaniemi, S. Leppävuori, L. Nánai

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Low temperature co-fired ceramics (LTCCs) are mainly applied in hybride microelectronics packaging technology, whereas the fabrication of metallic conductors on LTCC materials is done by various printing technologies. The conventional process is fast and cost-effective in the case of mass-production but too slow and difficult when repair and/or some modifications in circuitry are needed. Printing also fails when deposition of thin metal films on LTCC is demanded. Here, a simple laser-assisted process is presented by which the surface of LTCCs can be activated for consecutive electroless chemical metal plating. The method enables the realization of thick high-conductance metallic Cu micro-patterns and thin seed layers of Ag and Au, with a lateral resolution of a few tens of micrometers. The process is also suitable for 3D-MEMS applications. Morphological, structural and composition aspects of LTCC surfaces treated by a Nd:YAG pulses are carried out using FESEM, SEM, XRD and Raman measurements.

Original languageEnglish
Title of host publicationProceedings of SPIE - The International Society for Optical Engineering
Pages390-399
Number of pages10
Volume5118
DOIs
Publication statusPublished - 2003
EventNonatechnology - Maspalomas, Gran Canaria, Spain
Duration: May 19 2003May 21 2003

Other

OtherNonatechnology
CountrySpain
CityMaspalomas, Gran Canaria
Period5/19/035/21/03

Fingerprint

Ceramic materials
Metallizing
Surface treatment
ceramics
Lasers
lasers
printing
Printing
Temperature
plating
metal films
Plating
packaging
microelectronics
Microelectronics
yttrium-aluminum garnet
microelectromechanical systems
MEMS
Seed
micrometers

Keywords

  • Activation
  • Copper
  • Electroless plating
  • Gold
  • Laser irradiation
  • LTCC
  • Metallization
  • Silver

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Condensed Matter Physics

Cite this

Kordás, K., Pap, A., Saavalainen, J., Jantunen, H., Moilanen, P., Haapaniemi, E., ... Nánai, L. (2003). Laser-induced surface modification on LTCC materials for chemical metallization. In Proceedings of SPIE - The International Society for Optical Engineering (Vol. 5118, pp. 390-399) https://doi.org/10.1117/12.498990

Laser-induced surface modification on LTCC materials for chemical metallization. / Kordás, K.; Pap, A.; Saavalainen, J.; Jantunen, H.; Moilanen, P.; Haapaniemi, E.; Leppävuori, S.; Nánai, L.

Proceedings of SPIE - The International Society for Optical Engineering. Vol. 5118 2003. p. 390-399.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Kordás, K, Pap, A, Saavalainen, J, Jantunen, H, Moilanen, P, Haapaniemi, E, Leppävuori, S & Nánai, L 2003, Laser-induced surface modification on LTCC materials for chemical metallization. in Proceedings of SPIE - The International Society for Optical Engineering. vol. 5118, pp. 390-399, Nonatechnology, Maspalomas, Gran Canaria, Spain, 5/19/03. https://doi.org/10.1117/12.498990
Kordás K, Pap A, Saavalainen J, Jantunen H, Moilanen P, Haapaniemi E et al. Laser-induced surface modification on LTCC materials for chemical metallization. In Proceedings of SPIE - The International Society for Optical Engineering. Vol. 5118. 2003. p. 390-399 https://doi.org/10.1117/12.498990
Kordás, K. ; Pap, A. ; Saavalainen, J. ; Jantunen, H. ; Moilanen, P. ; Haapaniemi, E. ; Leppävuori, S. ; Nánai, L. / Laser-induced surface modification on LTCC materials for chemical metallization. Proceedings of SPIE - The International Society for Optical Engineering. Vol. 5118 2003. pp. 390-399
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