Laser induced liquid phase deposition (LCLD); The state of art

L. Nánai, K. Kordás, K. Bali

Research output: Contribution to journalConference article

5 Citations (Scopus)

Abstract

A review of results of a last few years investigation in the field of laser light induced liquid phase metal deposition on different substrates (polymers, semiconductors) is presented. The role of liquid phase chemical deposition technics represents a certain interest for contemporain microtechnology because of its technical and economical advantages compared to other technics e. g. chemical vapour phase deposition (CVD). The methods don't require harmful precursors, complicated vacuum tools, it is cost effective.

Original languageEnglish
Pages (from-to)228-248
Number of pages21
JournalProceedings of SPIE - The International Society for Optical Engineering
Volume4157
DOIs
Publication statusPublished - Jan 1 2001
EventLaser-Assisted Microtechnology 2000 - St. Petersburg-Pushkin, Russian Federation
Duration: Aug 23 2000Aug 25 2000

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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