Laser induced liquid phase deposition (LCLD); The state of art

L. Nánai, K. Kordás, K. Bali

Research output: Chapter in Book/Report/Conference proceedingConference contribution

5 Citations (Scopus)

Abstract

A review of results of a last few years investigation in the field of laser light induced liquid phase metal deposition on different substrates (polymers, semiconductors) is presented. The role of liquid phase chemical deposition technics represents a certain interest for contemporain microtechnology because of its technical and economical advantages compared to other technics e. g. chemical vapour phase deposition (CVD). The methods don't require harmful precursors, complicated vacuum tools, it is cost effective.

Original languageEnglish
Title of host publicationProceedings of SPIE - The International Society for Optical Engineering
EditorsV.P. Veiko
Pages228-248
Number of pages21
Volume4157
DOIs
Publication statusPublished - 2001
EventLaser-Assisted Microtechnology 2000 - St. Petersburg-Pushkin, Russian Federation
Duration: Aug 23 2000Aug 25 2000

Other

OtherLaser-Assisted Microtechnology 2000
CountryRussian Federation
CitySt. Petersburg-Pushkin
Period8/23/008/25/00

Fingerprint

liquid phases
Lasers
Liquids
lasers
Vapors
Vacuum
Semiconductor materials
vapor phases
costs
vacuum
polymers
Polymers
Substrates
Metals
metals
Costs

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Condensed Matter Physics

Cite this

Nánai, L., Kordás, K., & Bali, K. (2001). Laser induced liquid phase deposition (LCLD); The state of art. In V. P. Veiko (Ed.), Proceedings of SPIE - The International Society for Optical Engineering (Vol. 4157, pp. 228-248) https://doi.org/10.1117/12.413763

Laser induced liquid phase deposition (LCLD); The state of art. / Nánai, L.; Kordás, K.; Bali, K.

Proceedings of SPIE - The International Society for Optical Engineering. ed. / V.P. Veiko. Vol. 4157 2001. p. 228-248.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Nánai, L, Kordás, K & Bali, K 2001, Laser induced liquid phase deposition (LCLD); The state of art. in VP Veiko (ed.), Proceedings of SPIE - The International Society for Optical Engineering. vol. 4157, pp. 228-248, Laser-Assisted Microtechnology 2000, St. Petersburg-Pushkin, Russian Federation, 8/23/00. https://doi.org/10.1117/12.413763
Nánai L, Kordás K, Bali K. Laser induced liquid phase deposition (LCLD); The state of art. In Veiko VP, editor, Proceedings of SPIE - The International Society for Optical Engineering. Vol. 4157. 2001. p. 228-248 https://doi.org/10.1117/12.413763
Nánai, L. ; Kordás, K. ; Bali, K. / Laser induced liquid phase deposition (LCLD); The state of art. Proceedings of SPIE - The International Society for Optical Engineering. editor / V.P. Veiko. Vol. 4157 2001. pp. 228-248
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