Laser-induced etching and deposition of tungsten in tungstenhexafluoride-hydrogen atmosphere

K. Piglmayer, Zsolt Toth, Zoltan Kantor

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Citations (Scopus)

Abstract

Combined thermally induced etching and deposition of W in a mixture of WF6 and H2 is investigated by local laser-induced patterning of thin tungsten layers on quartz. The process divides into areas of pure etching and deposition, depending on the partial pressures of the gases.

Original languageEnglish
Title of host publicationProceedings of SPIE - The International Society for Optical Engineering
EditorsAlexander M. Prokhorov, Vladimir I. Pustovoy
PublisherSociety of Photo-Optical Instrumentation Engineers
Pages45-50
Number of pages6
ISBN (Print)0819418552
Publication statusPublished - Jan 1 1995
EventALT '94 International Conference: Laser Methods of Surface Treatment and Modification - Konstanz, Ger
Duration: Sep 5 1994Sep 9 1994

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume2498
ISSN (Print)0277-786X

Other

OtherALT '94 International Conference: Laser Methods of Surface Treatment and Modification
CityKonstanz, Ger
Period9/5/949/9/94

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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  • Cite this

    Piglmayer, K., Toth, Z., & Kantor, Z. (1995). Laser-induced etching and deposition of tungsten in tungstenhexafluoride-hydrogen atmosphere. In A. M. Prokhorov, & V. I. Pustovoy (Eds.), Proceedings of SPIE - The International Society for Optical Engineering (pp. 45-50). (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 2498). Society of Photo-Optical Instrumentation Engineers.