Laser direct writing of palladium on polyimide surfaces from solution

K. Kordás, K. Bali, S. Leppävuori, A. Uusimäki, L. Nánai

Research output: Contribution to journalArticle

22 Citations (Scopus)

Abstract

Conductive palladium (Pd) patterns were generated by laser-induced chemical liquid-phase deposition (LCLD) on polyimide (PI) substrates using a continuous Ar+ laser beam. The deposition process was executed from the amine complex solution of Pd2+ ions. Dependence of the characteristics of the laser direct written patterns on scanning speed of the laser beam, number of scans and laser power was examined. Deposits were characterized by Field Emission Scanning Electron Microscope (FESEM), Energy Dispersive Spectrometry (EDS), and profilometric measurements. The resistance of the patterns was also measured. It was found that good quality lines - narrow, homogeneous, and with high conductivity and adhesion - were achieved under optimized conditions.

Original languageEnglish
Pages (from-to)149-155
Number of pages7
JournalApplied Surface Science
Volume152
Issue number3
DOIs
Publication statusPublished - Nov 2 1999

ASJC Scopus subject areas

  • Chemistry(all)
  • Condensed Matter Physics
  • Physics and Astronomy(all)
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films

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