Laser deposition of two-dimensional tin oxide patterns

Research output: Contribution to conferencePaper

Abstract

Close to metallic electrical conductivity, yet still high transmittance in the visible and near-IR render tin oxide films indispensable in many important applications. One of the technological issues to be resolved before successful device fabrication is the efficient and controlled patterning of these films. SnOx films are physically and chemically resistant and adhere to various substrates and so their patterning is not a straightforward matter. This article reports novel a technique for two dimensional tin oxide patterning by localized laser deposition from the traditional precursor of spray pyrolysis.

Original languageEnglish
Number of pages1
Publication statusPublished - Jan 1 1996
EventProceedings of the 1996 Conference on Lasers and Electro-Optics Europe, CLEO/Europe - Hamburg, Ger
Duration: Sep 8 1996Sep 13 1996

Other

OtherProceedings of the 1996 Conference on Lasers and Electro-Optics Europe, CLEO/Europe
CityHamburg, Ger
Period9/8/969/13/96

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ASJC Scopus subject areas

  • Control and Systems Engineering
  • Electrical and Electronic Engineering

Cite this

Geretovszky, Z., Kelemen, L., & Szorenyi, T. (1996). Laser deposition of two-dimensional tin oxide patterns. Paper presented at Proceedings of the 1996 Conference on Lasers and Electro-Optics Europe, CLEO/Europe, Hamburg, Ger, .