Laser assisted chemical vapour deposition of diamond microstructures

Zsolt Tóth, Adam Mechler, Peter Heszler

Research output: Contribution to journalConference article

Abstract

High quality diamond has been deposited area selectively onto thin tungsten films layered onto fused silica substrates in a hot filament CVD reactor. The deposition method uses a hot filament process which is combined with localised heating by a focused Nd-YAG laser beam.

Original languageEnglish
Pages (from-to)138-141
Number of pages4
JournalProceedings of SPIE - The International Society for Optical Engineering
Volume3573
DOIs
Publication statusPublished - Aug 19 1998
Event5th Congress on Modern Optics, OPTIKA 1998 - Budapest, Hungary
Duration: Sep 14 1998Sep 17 1998

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Keywords

  • Cvd
  • Diamond
  • Laser heating

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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