Laser and e-beam generated micro-nanostructures on the surface of amorphous chalcogenide layers

Mihail Trunov, V. Takáts, Istvan Csarnovics, C. Cserháti, A. Csík, S. Kökényesi

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

The processes of direct, one-step surface relief formation, stimulated by laser illumination or e-beam, were investigated on AsxSe 1-x (0≤ x ≤ 0.5) and As2S3 layers, as well as on Se(Sb)/As2S3 nanomultilayers with total thickness d = 0.2-2.0 μn. The line profile formation during holographic or direct e-beam recoding in the same materials was analyzed. It was established that increased efficiency of optical amplitude- phase relief generation by laser- or e-beam was accompanied by giant local expansion (up to 20% of d, i.e. Δd≈20-200 nm) in optimized layer structures. Mechanisms of processes are related to the peculiarities of stimulated structural transformation within amorphous phase as well as to the changes of optical parameters and induced mass-transport in these materials. Some chalcogenide composition and nanostructures with best volume expansion were selected. It was shown that optical elements can be fabricated in such one-step direct recording processes.

Original languageEnglish
Title of host publicationTMS Annual Meeting
Pages641-647
Number of pages7
Volume2
Publication statusPublished - 2010
EventTMS 2010 - 139th Annual Meeting and Exhibition - Seattle, WA, United States
Duration: Feb 14 2010Feb 18 2010

Other

OtherTMS 2010 - 139th Annual Meeting and Exhibition
CountryUnited States
CitySeattle, WA
Period2/14/102/18/10

Fingerprint

Nanostructures
Lasers
Optical devices
lasers
expansion
Mass transfer
Lighting
Chemical analysis
recording
illumination
profiles

Keywords

  • Amorphous chalcogenides
  • Induced transforrnations
  • Relief recording

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Mechanics of Materials
  • Metals and Alloys

Cite this

Laser and e-beam generated micro-nanostructures on the surface of amorphous chalcogenide layers. / Trunov, Mihail; Takáts, V.; Csarnovics, Istvan; Cserháti, C.; Csík, A.; Kökényesi, S.

TMS Annual Meeting. Vol. 2 2010. p. 641-647.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Trunov, M, Takáts, V, Csarnovics, I, Cserháti, C, Csík, A & Kökényesi, S 2010, Laser and e-beam generated micro-nanostructures on the surface of amorphous chalcogenide layers. in TMS Annual Meeting. vol. 2, pp. 641-647, TMS 2010 - 139th Annual Meeting and Exhibition, Seattle, WA, United States, 2/14/10.
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AU - Csík, A.

AU - Kökényesi, S.

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