Large scale nanopatterning of graphene

P. L. Neumann, E. Tóvári, S. Csonka, K. Kamarás, Z. Horváth, L. Bíró

Research output: Contribution to journalArticle

12 Citations (Scopus)

Abstract

Recently, we have shown that the shaping of atomically perfect zig-zag oriented edges can be performed by exploiting the orientation dependent oxidation in graphene, by annealing the samples in inert atmosphere, where the oxygen source is the SiO 2 substrate itself. In the present study, we showed that the large scale patterning of graphene using a conventional lithography technique can be combined with the control of crystallographic orientation and edge shaping. We applied electron beam lithography (EBL) followed by low energy O +/Ar + plasma etching for patterning mechanically exfoliated graphene flakes. As AFM imaging of the samples revealed, the controlled oxidation transformed the originally circular holes to polygonal shape with edges parallel with the zig-zag direction, showing the possibility of atomically precise, large area patterning of graphene.

Original languageEnglish
Pages (from-to)130-133
Number of pages4
JournalNuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
Volume282
DOIs
Publication statusPublished - Jul 1 2012

Fingerprint

Graphene
graphene
lithography
Oxidation
oxidation
inert atmosphere
Plasma etching
Electron beam lithography
flakes
plasma etching
Lithography
atomic force microscopy
electron beams
Annealing
Imaging techniques
annealing
Oxygen
oxygen
Substrates
energy

Keywords

  • Annealing
  • Electron beam lithography (EBL)
  • Graphene
  • Nanopatterning
  • Plasma etching
  • Zig-zag

ASJC Scopus subject areas

  • Instrumentation
  • Nuclear and High Energy Physics

Cite this

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T1 - Large scale nanopatterning of graphene

AU - Neumann, P. L.

AU - Tóvári, E.

AU - Csonka, S.

AU - Kamarás, K.

AU - Horváth, Z.

AU - Bíró, L.

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