Kinetic study of 222 nm excimer lamp induced decomposition of palladium-acetate films

Z. Geretovszky, Ian W. Boyd

Research output: Contribution to journalArticle

13 Citations (Scopus)

Abstract

Wavelength selectivity, high intensity, long lifetime and low maintenance cost make excimer lamps a popular UV source for large area processing. Photo-induced metal seeding followed by electroless plating is one area where the use of these efficient light sources can contribute to the development of new techniques aimed at reducing the processing temperature. Although, the use of palladium-acetate to produce Pd seed layers has already been studied with various energy sources, including excimer lasers and lamps, the details of the photochemical mechanisms involved are still largely unexplored. In this paper the kinetics of 222 nm KrCl* excimer lamp initiated palladium-acetate decomposition are presented. The species ejected from the irradiated films were monitored in situ by mass spectrometry at ultra high vacuum. Interpretation of the time evolution of multichannel mass spectrometric data, together with complementary infrared, UV-visible spectrophotometric characterization has led to an understanding of the governing physical and chemical mechanisms which are described here for the first time.

Original languageEnglish
Pages (from-to)401-407
Number of pages7
JournalApplied Surface Science
Volume138-139
Issue number1-4
Publication statusPublished - Jan 1999

Fingerprint

Palladium
excimers
Electric lamps
luminaires
palladium
acetates
Acetates
Decomposition
decomposition
Kinetics
Light sources
kinetics
Electroless plating
Ultrahigh vacuum
Excimer lasers
energy sources
inoculation
Processing
plating
excimer lasers

Keywords

  • Excimer lamp
  • In situ/time resolved mass spectrometry
  • Palladium-acetate
  • Photochemical decomposition
  • UV processing

ASJC Scopus subject areas

  • Physical and Theoretical Chemistry
  • Surfaces, Coatings and Films
  • Condensed Matter Physics

Cite this

Kinetic study of 222 nm excimer lamp induced decomposition of palladium-acetate films. / Geretovszky, Z.; Boyd, Ian W.

In: Applied Surface Science, Vol. 138-139, No. 1-4, 01.1999, p. 401-407.

Research output: Contribution to journalArticle

@article{681b828080cd4fad83e5a22ade09071a,
title = "Kinetic study of 222 nm excimer lamp induced decomposition of palladium-acetate films",
abstract = "Wavelength selectivity, high intensity, long lifetime and low maintenance cost make excimer lamps a popular UV source for large area processing. Photo-induced metal seeding followed by electroless plating is one area where the use of these efficient light sources can contribute to the development of new techniques aimed at reducing the processing temperature. Although, the use of palladium-acetate to produce Pd seed layers has already been studied with various energy sources, including excimer lasers and lamps, the details of the photochemical mechanisms involved are still largely unexplored. In this paper the kinetics of 222 nm KrCl* excimer lamp initiated palladium-acetate decomposition are presented. The species ejected from the irradiated films were monitored in situ by mass spectrometry at ultra high vacuum. Interpretation of the time evolution of multichannel mass spectrometric data, together with complementary infrared, UV-visible spectrophotometric characterization has led to an understanding of the governing physical and chemical mechanisms which are described here for the first time.",
keywords = "Excimer lamp, In situ/time resolved mass spectrometry, Palladium-acetate, Photochemical decomposition, UV processing",
author = "Z. Geretovszky and Boyd, {Ian W.}",
year = "1999",
month = "1",
language = "English",
volume = "138-139",
pages = "401--407",
journal = "Applied Surface Science",
issn = "0169-4332",
publisher = "Elsevier",
number = "1-4",

}

TY - JOUR

T1 - Kinetic study of 222 nm excimer lamp induced decomposition of palladium-acetate films

AU - Geretovszky, Z.

AU - Boyd, Ian W.

PY - 1999/1

Y1 - 1999/1

N2 - Wavelength selectivity, high intensity, long lifetime and low maintenance cost make excimer lamps a popular UV source for large area processing. Photo-induced metal seeding followed by electroless plating is one area where the use of these efficient light sources can contribute to the development of new techniques aimed at reducing the processing temperature. Although, the use of palladium-acetate to produce Pd seed layers has already been studied with various energy sources, including excimer lasers and lamps, the details of the photochemical mechanisms involved are still largely unexplored. In this paper the kinetics of 222 nm KrCl* excimer lamp initiated palladium-acetate decomposition are presented. The species ejected from the irradiated films were monitored in situ by mass spectrometry at ultra high vacuum. Interpretation of the time evolution of multichannel mass spectrometric data, together with complementary infrared, UV-visible spectrophotometric characterization has led to an understanding of the governing physical and chemical mechanisms which are described here for the first time.

AB - Wavelength selectivity, high intensity, long lifetime and low maintenance cost make excimer lamps a popular UV source for large area processing. Photo-induced metal seeding followed by electroless plating is one area where the use of these efficient light sources can contribute to the development of new techniques aimed at reducing the processing temperature. Although, the use of palladium-acetate to produce Pd seed layers has already been studied with various energy sources, including excimer lasers and lamps, the details of the photochemical mechanisms involved are still largely unexplored. In this paper the kinetics of 222 nm KrCl* excimer lamp initiated palladium-acetate decomposition are presented. The species ejected from the irradiated films were monitored in situ by mass spectrometry at ultra high vacuum. Interpretation of the time evolution of multichannel mass spectrometric data, together with complementary infrared, UV-visible spectrophotometric characterization has led to an understanding of the governing physical and chemical mechanisms which are described here for the first time.

KW - Excimer lamp

KW - In situ/time resolved mass spectrometry

KW - Palladium-acetate

KW - Photochemical decomposition

KW - UV processing

UR - http://www.scopus.com/inward/record.url?scp=0010783633&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0010783633&partnerID=8YFLogxK

M3 - Article

VL - 138-139

SP - 401

EP - 407

JO - Applied Surface Science

JF - Applied Surface Science

SN - 0169-4332

IS - 1-4

ER -