Kinetic studies of laser-induced synthesis of thin vanadium pentoxide films

T. Szorényi, L. Baufay, M. C. Joliet, F. Hanus, R. Andrew, I. Hevesi

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The kinetics of Ar+ laser-induced oxidation of 100 nm thick vanadium films on glass substrates is followed by measuring time-dependent changes in reflected and transmitted intensity of a He-Ne probe beam. The growth rate of the vanadium pentoxide layer υ increases with increasing laser power P as υ =υ0 exp(-a/P). At power densities above kW/cm2 vanadium pentoxide crystallizes from the melt.

Original languageEnglish
Pages (from-to)251-255
Number of pages5
JournalApplied Physics A Solids and Surfaces
Issue number4
Publication statusPublished - Apr 1 1986



  • 61.80B
  • 64.70
  • 68.55

ASJC Scopus subject areas

  • Materials Science(all)
  • Engineering(all)
  • Physics and Astronomy (miscellaneous)

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