IR study of the formation process of polymeric hydrogenated amorphous carbon film

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IR spectroscopic studies have been carried out on samples, which were prepared from benzene at at relatively high pressure and low self-bias voltage region. The samples show well-resolved spectral features both in the sp3- and the sp2-hybridized spectral regions. The spectral resolution and separation of bands in the sp2 region, and the good signal-to-noise ratio allows Gaussian decomposition of the distinct bands, even in the more crowded sp3 region. The C-H vibrations show two different neighborhoods, a nearly stress-free, and a highly stressed one. By increasing the deposition voltage, the amplitude of the stress-free region decreases.

Original languageEnglish
Pages (from-to)1110-1114
Number of pages5
JournalDiamond and Related Materials
Issue number3-6
Publication statusPublished - Mar 1 2002



  • Amorphous hydrogenated carbon
  • Growth
  • IR
  • Spectroscopy

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Chemistry(all)
  • Mechanical Engineering
  • Materials Chemistry
  • Electrical and Electronic Engineering

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