Ir and Rh silicide formation investigated by microprobe RBS

Y. K. Park, F. Pászti, M. Takai, G. Temmel, E. P. Buerte, H. Ryssel, R. Wiget, A. Kinomura, Y. Horino, K. Fujii

Research output: Contribution to journalArticle

2 Citations (Scopus)

Abstract

Detailed in-depth information about suicide formation on patterned Ir and Rh suicide samples was obtained by ion microprobes using grazing exit angle. The samples consisted of square shaped Ir or Rh suicide islands on the bottom of windows opened through a thick SiO2 layer. In case of 1.5 MeV energy beam it was possible to map the samples up to their largest depths of importance, but with a moderate depth resolution. The in-depth details were also resolved using a 400 keV energy beam at grazing detecting angle. It was revealed that rapid thermal annealing at 700°C for 2 min resulted in good quality suicides (e.g. IrSi3 and RhSi1.3), while in case of furnace annealing at 450°C for 120 min the metal layers remained almost untransformed and became oxidized.

Original languageEnglish
Pages (from-to)728-733
Number of pages6
JournalNuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
Volume130
Issue number1-4
DOIs
Publication statusPublished - Jul 1997

ASJC Scopus subject areas

  • Nuclear and High Energy Physics
  • Instrumentation

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