Ionization enhanced annealing in P and As implanted Si layers

J. Suski, J. Krynicki, H. Rzewuski, J. Gyulai

Research output: Contribution to journalArticle

2 Citations (Scopus)
Original languageEnglish
Pages (from-to)125-126
Number of pages2
JournalRadiation effects
Volume30
Issue number2
DOIs
Publication statusPublished - Jan 1 1976

ASJC Scopus subject areas

  • Engineering(all)

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