Ionization by drift and ambipolar electric fields in electronegative capacitive radio frequency plasmas

J. Schulze, A. Derzsi, K. Dittmann, T. Hemke, J. Meichsner, Z. Donkó

Research output: Contribution to journalArticle

107 Citations (Scopus)

Abstract

Unlike α- and γ-mode operation, electrons accelerated by strong drift and ambipolar electric fields in the plasma bulk and at the sheath edges are found to dominate the ionization in strongly electronegative discharges. These fields are caused by a low bulk conductivity and local maxima of the electron density at the sheath edges, respectively. This drift-ambipolar mode is investigated by kinetic particle simulations, experimental phase-resolved optical emission spectroscopy, and an analytical model in CF 4. Mode transitions induced by voltage and pressure variations are studied.

Original languageEnglish
Article number275001
JournalPhysical review letters
Volume107
Issue number27
DOIs
Publication statusPublished - Dec 28 2011

ASJC Scopus subject areas

  • Physics and Astronomy(all)

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