Ion bombardment induced modification of polyvinyltrimethylsilane studied by XPS

A. Tóth, I. Bertóti, V. S. Khotimsky

Research output: Contribution to journalArticle

12 Citations (Scopus)

Abstract

Polyvinyltrimethylsilane films were bombarded by 1 keV and 5 keV Ar+ and N2+ ions up to fluences of about 1017 ions cm-2. XPS studies showed the actual surface composition and the chemical bonding to be dependent on the nature of the projectile applied, the ion energy, the fluence, the presence or absence of low energy flooding electrons, and the time elapsed between the ion beam treatment steps. Exposure of the ion beam treated samples to ambient air resulted in a strong uptake of oxygen, the attack of which took place predominantly on Si and to a lesser extent on C.

Original languageEnglish
Pages (from-to)551-555
Number of pages5
JournalSurface and Interface Analysis
Volume22
Issue number1
Publication statusPublished - Jan 1 1994

Fingerprint

Ion bombardment
bombardment
X ray photoelectron spectroscopy
Ions
Ion beams
fluence
ion beams
ions
Projectiles
Surface structure
attack
projectiles
electron energy
Oxygen
Electrons
air
oxygen
Air
energy

ASJC Scopus subject areas

  • Colloid and Surface Chemistry
  • Physical and Theoretical Chemistry

Cite this

Ion bombardment induced modification of polyvinyltrimethylsilane studied by XPS. / Tóth, A.; Bertóti, I.; Khotimsky, V. S.

In: Surface and Interface Analysis, Vol. 22, No. 1, 01.01.1994, p. 551-555.

Research output: Contribution to journalArticle

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