Particle-in-cell (PIC/MCC) simulations of capacitively-coupled Ar, CF 4, and CF4/Ar discharges excited by a single RF source or by two sources of different frequencies are presented. The properties and the formation mechanism of the flux-energy distribution of the ions reaching the electrodes is analyzed in detail. It is demonstrated that at low pressures the ion energy and the ion flux can nearly independently be controlled by properly choosing the excitation frequencies.
ASJC Scopus subject areas
- Physics and Astronomy(all)