Ion behavior in capacitively-coupled dual-frequency discharges

Zoltán Donkó, Zoran Lj Petrović

Research output: Contribution to journalArticle

27 Citations (Scopus)

Abstract

Particle-in-cell (PIC/MCC) simulations of capacitively-coupled Ar, CF 4, and CF4/Ar discharges excited by a single RF source or by two sources of different frequencies are presented. The properties and the formation mechanism of the flux-energy distribution of the ions reaching the electrodes is analyzed in detail. It is demonstrated that at low pressures the ion energy and the ion flux can nearly independently be controlled by properly choosing the excitation frequencies.

Original languageEnglish
Article number012011
JournalJournal of Physics: Conference Series
Volume86
Issue number1
DOIs
Publication statusPublished - Jun 1 2007

Fingerprint

ions
energy distribution
low pressure
electrodes
cells
excitation
simulation
energy

ASJC Scopus subject areas

  • Physics and Astronomy(all)

Cite this

Ion behavior in capacitively-coupled dual-frequency discharges. / Donkó, Zoltán; Petrović, Zoran Lj.

In: Journal of Physics: Conference Series, Vol. 86, No. 1, 012011, 01.06.2007.

Research output: Contribution to journalArticle

@article{fb7f9bf7cad94c5a8f6dba9c07c90518,
title = "Ion behavior in capacitively-coupled dual-frequency discharges",
abstract = "Particle-in-cell (PIC/MCC) simulations of capacitively-coupled Ar, CF 4, and CF4/Ar discharges excited by a single RF source or by two sources of different frequencies are presented. The properties and the formation mechanism of the flux-energy distribution of the ions reaching the electrodes is analyzed in detail. It is demonstrated that at low pressures the ion energy and the ion flux can nearly independently be controlled by properly choosing the excitation frequencies.",
author = "Zolt{\'a}n Donk{\'o} and Petrović, {Zoran Lj}",
year = "2007",
month = "6",
day = "1",
doi = "10.1088/1742-6596/86/1/012011",
language = "English",
volume = "86",
journal = "Journal of Physics: Conference Series",
issn = "1742-6588",
publisher = "IOP Publishing Ltd.",
number = "1",

}

TY - JOUR

T1 - Ion behavior in capacitively-coupled dual-frequency discharges

AU - Donkó, Zoltán

AU - Petrović, Zoran Lj

PY - 2007/6/1

Y1 - 2007/6/1

N2 - Particle-in-cell (PIC/MCC) simulations of capacitively-coupled Ar, CF 4, and CF4/Ar discharges excited by a single RF source or by two sources of different frequencies are presented. The properties and the formation mechanism of the flux-energy distribution of the ions reaching the electrodes is analyzed in detail. It is demonstrated that at low pressures the ion energy and the ion flux can nearly independently be controlled by properly choosing the excitation frequencies.

AB - Particle-in-cell (PIC/MCC) simulations of capacitively-coupled Ar, CF 4, and CF4/Ar discharges excited by a single RF source or by two sources of different frequencies are presented. The properties and the formation mechanism of the flux-energy distribution of the ions reaching the electrodes is analyzed in detail. It is demonstrated that at low pressures the ion energy and the ion flux can nearly independently be controlled by properly choosing the excitation frequencies.

UR - http://www.scopus.com/inward/record.url?scp=36348948433&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=36348948433&partnerID=8YFLogxK

U2 - 10.1088/1742-6596/86/1/012011

DO - 10.1088/1742-6596/86/1/012011

M3 - Article

VL - 86

JO - Journal of Physics: Conference Series

JF - Journal of Physics: Conference Series

SN - 1742-6588

IS - 1

M1 - 012011

ER -