Ion beam mixing by focused ion beam

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Abstract

Si amorphous (41 nm)/Cr polycrystalline (46 nm) multilayer structure was irradiated by 30 keV Ga+ ions with fluences in the range of 25-820 ions nm2 using a focused ion beam. The effect of irradiation on the concentration distribution was studied by Auger electron spectroscopy depth profiling, cross-sectional transmission electron microscopy, and atomic force microscopy. The ion irradiation did not result in roughening on the free surface. On the other hand, the Ga+ irradiation produced a strongly mixed region around the first Si/Cr interface. The thickness of mixed region depends on the Ga+ fluence and it is joined to the pure Cr matrix with an unusual sharp interface. With increasing fluence the width of the mixed region increases but the interface between the mixed layer and pure Cr remains sharp. TRIDYN simulation failed to reproduce this behavior. Assuming that the Ga+ irradiation induces asymmetric mixing, that is during the mixing process the Cr can enter the Si layer, but the Si cannot enter the Cr layer, the experimental findings can qualitatively be explained.

Original languageEnglish
Article number053513
JournalJournal of Applied Physics
Volume102
Issue number5
DOIs
Publication statusPublished - Sep 20 2007

ASJC Scopus subject areas

  • Physics and Astronomy(all)

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