Ion beam irradiated optical channel waveguides

I. Bányász, I. Rajta, G. U.L. Nagy, Z. Zolnai, V. Havranek, S. Pelli, M. Veres, L. Himics, S. Berneschi, G. Nunzi-Conti, G. C. Righini

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)


Nowadays, in the modern optical communications systems, channel waveguides represent the core of many active and passive integrated devices, such as amplifiers, lasers, couplers and splitters. Different materials and fabrication processes were investigated in order to achieve the aforementioned optoelectronic circuits with low costs and high performance and reproducibility. Nevertheless, the 2D guiding structures fabrication continues to be a challenging task in some of optical materials due to their susceptibility to mechanical and/or chemical damages which can occur during the different steps of the fabrication process. Here we report on channel waveguides demonstration in erbium doped Tungsten - Tellurite (Er3+:TeO2-WO 3) glasses and BGO crystals by means of a masked ion beam and/or direct writing processes performed at different energy MeV and ions species. The evidence of the waveguides formation was investigated by microscopy techniques and micro Raman spectroscopy.

Original languageEnglish
Title of host publicationIntegrated Optics
Subtitle of host publicationDevices, Materials, and Technologies XVIII
ISBN (Print)9780819499011
Publication statusPublished - Jan 1 2014
EventIntegrated Optics: Devices, Materials, and Technologies XVIII - San Francisco, CA, United States
Duration: Feb 3 2014Feb 5 2014

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
ISSN (Print)0277-786X
ISSN (Electronic)1996-756X


OtherIntegrated Optics: Devices, Materials, and Technologies XVIII
CountryUnited States
CitySan Francisco, CA



  • Bismuth germanate
  • Channel optical waveguides
  • Er-doped tungsten-tellurite glass
  • Focused ion beam
  • Ion beam irradiation
  • Micro Raman spectroscopy
  • Phase contrast microscopy
  • Srim simulation

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

Cite this

Bányász, I., Rajta, I., Nagy, G. U. L., Zolnai, Z., Havranek, V., Pelli, S., Veres, M., Himics, L., Berneschi, S., Nunzi-Conti, G., & Righini, G. C. (2014). Ion beam irradiated optical channel waveguides. In Integrated Optics: Devices, Materials, and Technologies XVIII [898814] (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 8988). SPIE.