Poly(vinyltrimethylsilane) (PVTMS), poly(dimethylsiloxane) (PDMSO), poly(methylsilsesquioxane) (PMeSSO), and poly(phenylsilsesquioxane) (PPhSSO) were bombarded by 2.5 keV Ar+ ions and the beam induced chemical effects were studied by XPS and XAES. For PVTMS the gradual development of a new component on the high kinetic energy side of the original Si KL23L23 peak was observed, which was attributed to the formation of [SiC4] units present in a densely crosslinked matrix. For the poly(organosiloxanes) PDMSO, PMeSSO and PPhSSO a kind of disproportionation of Si was inferred from the evolution of their Si 2p and Si KL23L23 peaks, involving the transformation of a part of the original [SiCxOy] units to [SiC4]-type and [SiO4]-type ones surrounded by a densely crosslinked organosilicon matrix.
|Number of pages||6|
|Journal||Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms|
|Publication status||Published - Aug 1996|
ASJC Scopus subject areas
- Nuclear and High Energy Physics