Ion beam induced chemical effects in organosilicon polymers

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Abstract

Poly(vinyltrimethylsilane) (PVTMS), poly(dimethylsiloxane) (PDMSO), poly(methylsilsesquioxane) (PMeSSO), and poly(phenylsilsesquioxane) (PPhSSO) were bombarded by 2.5 keV Ar+ ions and the beam induced chemical effects were studied by XPS and XAES. For PVTMS the gradual development of a new component on the high kinetic energy side of the original Si KL23L23 peak was observed, which was attributed to the formation of [SiC4] units present in a densely crosslinked matrix. For the poly(organosiloxanes) PDMSO, PMeSSO and PPhSSO a kind of disproportionation of Si was inferred from the evolution of their Si 2p and Si KL23L23 peaks, involving the transformation of a part of the original [SiCxOy] units to [SiC4]-type and [SiO4]-type ones surrounded by a densely crosslinked organosilicon matrix.

Original languageEnglish
Pages (from-to)299-304
Number of pages6
JournalNuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
Volume116
Issue number1-4
DOIs
Publication statusPublished - Aug 1996

ASJC Scopus subject areas

  • Nuclear and High Energy Physics
  • Instrumentation

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