Investigations on the element dependency of sputtering process in the electrolyte cathode atmospheric discharger

Tamás Cserfalvi, Pál Mezei

Research output: Contribution to journalArticle

35 Citations (Scopus)

Abstract

Using a coupling of ICP with a closed electrolyte cathode discharge (ELCAD) cell as nebulizer unit it was possible to observe a well defined element dependency of the cathode sputtering process on the electrolyte surface. Investigating the ICP signal ratio referred to the pneumatic nebulization, the ELCAD sputtering produces about three times higher mass transport for Al, Cr, Pb and Cd than for Mg and Cu. B, Ba and Ca have an even lower signal while Hg shows a "super-sputtering" effect, having a 17 times higher signal with ELCAD than with pneumatic nebulization. Assuming that positively charged particles are forced back to the cathode by the 107 V m-1 field in the cathode dark space these observations fit to the model of stepwise charge neutralization by hydrolysis in the vapor-phase, which process is known in mass spectrometry. The sputtering process in the ELCAD can be described with a four-zone kinematic model of the cathode dark space.

Original languageEnglish
Pages (from-to)939-944
Number of pages6
JournalJournal of analytical atomic spectrometry
Volume20
Issue number9
DOIs
Publication statusPublished - Sep 1 2005

ASJC Scopus subject areas

  • Analytical Chemistry
  • Spectroscopy

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