Investigations of surface layers produced by chemical treatment of GaP

M. Somogyi, M. Farkas-Jahnke, G. Mezey, J. Gyulai

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5 Citations (Scopus)


The composition and structure of etched (100) GaP surfaces were studied just after etching and during aging. The two etchants, aqua regia and bromine in methanol, act through diffusion-limited and kinetically controlled processes respectively. The surface layer was found to have a substoichiometric oxide composition. The structural state of the surface etched with aqua regia could be explained by the chemical behaviour of the gallium ions in the aqueous medium, i.e. amorphous and porous surface layers containing water were produced at room temperature, whilst a dense crystalline water free layer was formed at boiling temperature. The bromine etchant also produced a water free surface. Just after etching (1.5-2) × 1015 O atoms cm-2 and about 2 × 1015 disordered Ga atoms cm-2 were produced by the acid etchant on the surface (determined by backscattering analysis). These values were not dependent on the etching temperature, in agreement with the diffusion-limited character of the aqua regia action.

Original languageEnglish
Pages (from-to)377-386
Number of pages10
JournalThin Solid Films
Issue number3
Publication statusPublished - Jul 2 1979

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Materials Chemistry

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