Investigation of Ta2O5 thin film evolution

J. Kristóf, Achille De Battisti, G. Keresztury, E. Horváth, Tamás Szilágyi

Research output: Contribution to journalArticle

9 Citations (Scopus)

Abstract

The thermal evolution process of a Ta2O5 thin film from a TaCl5 precursor was followed by thermogravimetry combined with mass spectrometry. The TaCl5 coating was prepared by the deposition of dissolved TaCl5 (in 2-propanol) onto a titanium metal support. After evaporation of the solvent, the gellike film was heated in an atmosphere containing 20% O2 and 80% Ar to 600 °C. Mass spectrometric ion intensity curves show the liberation of chlorinated species in a uniform, slow process between 200 and 500 °C and in a fast reaction in the 500-600 °C range. Bonded solvent is decomposed in an oxidative cracking process between 120 and 220 °C, resulting in the formation of elemental carbon trapped in the film. Combustion of trapped carbon takes place in the 500-600 °C range resulting in the formation of CO2 gas inclusions in the quickly solidifying surface layer as evidenced by diffuse reflectance Fourier transform infrared spectrometry.

Original languageEnglish
Pages (from-to)1637-1640
Number of pages4
JournalLangmuir
Volume17
Issue number5
DOIs
Publication statusPublished - Mar 6 2001

Fingerprint

Carbon
Thin films
2-Propanol
carbon
Propanol
thin films
thermogravimetry
Titanium
Spectrometry
Mass spectrometry
Thermogravimetric analysis
surface layers
Fourier transforms
Evaporation
mass spectroscopy
titanium
Gases
Metals
evaporation
inclusions

ASJC Scopus subject areas

  • Physical and Theoretical Chemistry
  • Colloid and Surface Chemistry

Cite this

Investigation of Ta2O5 thin film evolution. / Kristóf, J.; De Battisti, Achille; Keresztury, G.; Horváth, E.; Szilágyi, Tamás.

In: Langmuir, Vol. 17, No. 5, 06.03.2001, p. 1637-1640.

Research output: Contribution to journalArticle

Kristóf, J. ; De Battisti, Achille ; Keresztury, G. ; Horváth, E. ; Szilágyi, Tamás. / Investigation of Ta2O5 thin film evolution. In: Langmuir. 2001 ; Vol. 17, No. 5. pp. 1637-1640.
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