Investigation of RuO2/Ta2O5 thin film evolution by thermogravimetry combined with mass spectrometry

János Kristóf, Tamás Szilágyi, Erzsébet Horváth, Ray L. Frost

Research output: Contribution to journalArticle

11 Citations (Scopus)


The thermal evolution process of RuO2-Ta2O 5/Ti coatings with varying noble metal content has been investigated under in situ conditions by thermogravimetry combined with mass spectrometry. The gel-like films prepared from alcoholic solutions of the precursor salts (RuCl3•3H2O, TaCl5) onto titanium metal support were heated in an atmosphere containing 20% O2 and 80% Ar up to 600 °C. The evolution of the mixed oxide coatings was followed by the mass spectrometric ion intensity curves. The cracking of retained solvent and the combustion of organic surface species formed were also followed by the mass spectrometric curves. The formation of carbonyl- and carboxylate-type surface species connected to the noble metal was identified by Fourier transform infrared emission spectroscopy. These secondary processes-catalyzed by the noble metal-may play an important role in the development of surface morphology and electrochemical properties. The evolution of the two oxide phases does not take place independently, and the effect of the noble metal as a combustion catalyst was proved.

Original languageEnglish
Pages (from-to)90-94
Number of pages5
JournalThin Solid Films
Issue number1-2
Publication statusPublished - Aug 1 2005


  • Fourier transform infrared spectroscopy (FTIR)
  • Oxides
  • Ruthenium
  • Tantalum

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Materials Chemistry

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