Investigation of parallel heat-flow path in electrothermal microsystems

Péter G. Szabó, V. Székely

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Abstract

Due to the miniaturization seen in the last decades, several macro models that neglect parameters have to be revised in order to evaluate the behavior of different types of microsystems. In this paper we present the analysis of one such parameter which affects the thermal functionality, namely, the convection of natural gases. In macro scale this parameter is usually neglected, because the conductivity of gases is several magnitude smaller than that of the base materials. With the advance of microfabrication really good thermal isolation can be achieved and so their values can be evenly compared and the models have to be revised. This effect can be easily modeled on microstructures whose thermal resistance can be compared to the thermal conductivity of natural gases and whose output is temperature dependent. For this purpose different types of cantilevers with embedded thermopiles and heating resistors were used. The modeling and experimental results show that in microsystems that are sensitive to temperature change, the parallel heat flow created by the surrounding gases have significant impact on the operation.

Original languageEnglish
Title of host publicationSymposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2010
Pages215-220
Number of pages6
Publication statusPublished - 2010
EventSymposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2010 - Seville, Spain
Duration: May 5 2010May 7 2010

Other

OtherSymposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2010
CountrySpain
CitySeville
Period5/5/105/7/10

Fingerprint

Microsystems
Macros
Natural gas
Thermopiles
Heat transfer
Microfabrication
Gases
Heat resistance
Resistors
Thermal conductivity
Heating
Temperature
Microstructure
Hot Temperature
Convection

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

Cite this

Szabó, P. G., & Székely, V. (2010). Investigation of parallel heat-flow path in electrothermal microsystems. In Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2010 (pp. 215-220). [5486460]

Investigation of parallel heat-flow path in electrothermal microsystems. / Szabó, Péter G.; Székely, V.

Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2010. 2010. p. 215-220 5486460.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Szabó, PG & Székely, V 2010, Investigation of parallel heat-flow path in electrothermal microsystems. in Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2010., 5486460, pp. 215-220, Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2010, Seville, Spain, 5/5/10.
Szabó PG, Székely V. Investigation of parallel heat-flow path in electrothermal microsystems. In Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2010. 2010. p. 215-220. 5486460
Szabó, Péter G. ; Székely, V. / Investigation of parallel heat-flow path in electrothermal microsystems. Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2010. 2010. pp. 215-220
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