Investigation of Nanostructure and Mechanical Properties of TaSi 2 Films on Silicon

S. I. Sidorenko, Yu M. Makogon, S. M. Dub, O. P. Pavlova, D. Beke, A. Chik, O. V. Zelenin

Research output: Contribution to journalArticle

Original languageEnglish
Pages (from-to)737-745+III
JournalMetallofizika i Noveishie Tekhnologii
Volume25
Issue number6
Publication statusPublished - Jun 2003

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Silicon
Nanostructures
mechanical properties
Mechanical properties
silicon

ASJC Scopus subject areas

  • Materials Science(all)
  • Electronic, Optical and Magnetic Materials
  • Metals and Alloys
  • Condensed Matter Physics

Cite this

Sidorenko, S. I., Makogon, Y. M., Dub, S. M., Pavlova, O. P., Beke, D., Chik, A., & Zelenin, O. V. (2003). Investigation of Nanostructure and Mechanical Properties of TaSi 2 Films on Silicon. Metallofizika i Noveishie Tekhnologii, 25(6), 737-745+III.

Investigation of Nanostructure and Mechanical Properties of TaSi 2 Films on Silicon. / Sidorenko, S. I.; Makogon, Yu M.; Dub, S. M.; Pavlova, O. P.; Beke, D.; Chik, A.; Zelenin, O. V.

In: Metallofizika i Noveishie Tekhnologii, Vol. 25, No. 6, 06.2003, p. 737-745+III.

Research output: Contribution to journalArticle

Sidorenko, SI, Makogon, YM, Dub, SM, Pavlova, OP, Beke, D, Chik, A & Zelenin, OV 2003, 'Investigation of Nanostructure and Mechanical Properties of TaSi 2 Films on Silicon', Metallofizika i Noveishie Tekhnologii, vol. 25, no. 6, pp. 737-745+III.
Sidorenko SI, Makogon YM, Dub SM, Pavlova OP, Beke D, Chik A et al. Investigation of Nanostructure and Mechanical Properties of TaSi 2 Films on Silicon. Metallofizika i Noveishie Tekhnologii. 2003 Jun;25(6):737-745+III.
Sidorenko, S. I. ; Makogon, Yu M. ; Dub, S. M. ; Pavlova, O. P. ; Beke, D. ; Chik, A. ; Zelenin, O. V. / Investigation of Nanostructure and Mechanical Properties of TaSi 2 Films on Silicon. In: Metallofizika i Noveishie Tekhnologii. 2003 ; Vol. 25, No. 6. pp. 737-745+III.
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