Investigation of multilayer silicon structures with buried iron suicide nanocrystallites: Growth, structure, and properties

N. G. Galkin, D. L. Goroshko, V. O. Polyarnyi, E. A. Chusovitin, V. V. Korobtsov, V. V. Balashev, Y. Khang, L. Dozsa, A. K. Gutakovsky, A. V. Latyshev, T. S. Shamirzaev, K. S. Zhuravlev

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The growth of nanosize islands of iron suicides on Si(100) substrates and epitaxial silicon overgrowth atop them have been studied by low energy electron diffraction and reflectance high energy electron diffraction methods. The near optimal formation conditions of iron suicide islands with high density and minimal sizes have been determined by using of atomic force microscopy. Multilayer (8-10) monolithic structures with buried iron suicide nanocrystallites have been grown after the definition of monocrystalline burying conditions of iron suicides nanocrystallites in silicon lattice. The structure of buried nanocrystallites has been studied in multilayer monolithic heterostructures by high resolution transmission electron microscopy. It was established that in multilayer samples the majority of nanocrystallites have β-FeSi 2 structure, but some of them have γ-FeSi 2 structure. It was observed an influence of additional annealing at 850 °C on the morphology and structure of nanocrystallites. By means of deep level transient spectroscopy data one and two trap levels have been observed in multilayer structures (without and with additional annealing, respectively). Photoluminescence spectra have been studied at 4.2 K and the causes of its absence from buried β-FeSi 2 NC have been analyzed.

Original languageEnglish
Pages (from-to)527-534
Number of pages8
JournalJournal of Nanoscience and Nanotechnology
Issue number2
Publication statusPublished - Feb 1 2008



  • Epitaxy
  • Iron suicides
  • Multilayer heterostructure
  • Nanocrystallite
  • Photoluminescence
  • Point defects
  • Silicon

ASJC Scopus subject areas

  • Bioengineering
  • Chemistry(all)
  • Biomedical Engineering
  • Materials Science(all)
  • Condensed Matter Physics

Cite this

Galkin, N. G., Goroshko, D. L., Polyarnyi, V. O., Chusovitin, E. A., Korobtsov, V. V., Balashev, V. V., Khang, Y., Dozsa, L., Gutakovsky, A. K., Latyshev, A. V., Shamirzaev, T. S., & Zhuravlev, K. S. (2008). Investigation of multilayer silicon structures with buried iron suicide nanocrystallites: Growth, structure, and properties. Journal of Nanoscience and Nanotechnology, 8(2), 527-534.