Investigation of mechanical properties of the generated surface structures on a chalcogenide thin film with AFM

Judit Kaman, Attila Bonyar, Istvan Csarnovics, C. Cserháti

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Light induced holographic grating and electron beam induced stripes were created on Ge28Se72 chalcogenide thin film and its local surface mechanical properties were studied by AFM. The Young's moduli of the grating, the stripes and the reference area were determined through force curves and the tip-sample energy dissipation was calculated from the tapping mode point spectroscopy curves. Significant difference was obtained between the created structures and the reference area regarding the Young's modulus and the tip-sample energy dissipation.

Original languageEnglish
Title of host publication2015 IEEE 21st International Symposium for Design and Technology in Electronic Packaging, SIITME 2015
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages51-55
Number of pages5
ISBN (Print)9781509003327
DOIs
Publication statusPublished - Nov 30 2015
Event21st IEEE International Symposium for Design and Technology in Electronic Packaging, SIITME 2015 - Brasov
Duration: Oct 22 2015Oct 25 2015

Other

Other21st IEEE International Symposium for Design and Technology in Electronic Packaging, SIITME 2015
CityBrasov
Period10/22/1510/25/15

Fingerprint

Surface structure
Energy dissipation
Elastic moduli
Holographic gratings
Thin films
Mechanical properties
Electron beams
Spectroscopy

Keywords

  • AFM
  • chalcogenide
  • electron beam recording
  • holographic recording
  • Young modulus

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering

Cite this

Kaman, J., Bonyar, A., Csarnovics, I., & Cserháti, C. (2015). Investigation of mechanical properties of the generated surface structures on a chalcogenide thin film with AFM. In 2015 IEEE 21st International Symposium for Design and Technology in Electronic Packaging, SIITME 2015 (pp. 51-55). [7342294] Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/SIITME.2015.7342294

Investigation of mechanical properties of the generated surface structures on a chalcogenide thin film with AFM. / Kaman, Judit; Bonyar, Attila; Csarnovics, Istvan; Cserháti, C.

2015 IEEE 21st International Symposium for Design and Technology in Electronic Packaging, SIITME 2015. Institute of Electrical and Electronics Engineers Inc., 2015. p. 51-55 7342294.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Kaman, J, Bonyar, A, Csarnovics, I & Cserháti, C 2015, Investigation of mechanical properties of the generated surface structures on a chalcogenide thin film with AFM. in 2015 IEEE 21st International Symposium for Design and Technology in Electronic Packaging, SIITME 2015., 7342294, Institute of Electrical and Electronics Engineers Inc., pp. 51-55, 21st IEEE International Symposium for Design and Technology in Electronic Packaging, SIITME 2015, Brasov, 10/22/15. https://doi.org/10.1109/SIITME.2015.7342294
Kaman J, Bonyar A, Csarnovics I, Cserháti C. Investigation of mechanical properties of the generated surface structures on a chalcogenide thin film with AFM. In 2015 IEEE 21st International Symposium for Design and Technology in Electronic Packaging, SIITME 2015. Institute of Electrical and Electronics Engineers Inc. 2015. p. 51-55. 7342294 https://doi.org/10.1109/SIITME.2015.7342294
Kaman, Judit ; Bonyar, Attila ; Csarnovics, Istvan ; Cserháti, C. / Investigation of mechanical properties of the generated surface structures on a chalcogenide thin film with AFM. 2015 IEEE 21st International Symposium for Design and Technology in Electronic Packaging, SIITME 2015. Institute of Electrical and Electronics Engineers Inc., 2015. pp. 51-55
@inproceedings{2dc34cdb562b4f7b94fa9f25c07330fe,
title = "Investigation of mechanical properties of the generated surface structures on a chalcogenide thin film with AFM",
abstract = "Light induced holographic grating and electron beam induced stripes were created on Ge28Se72 chalcogenide thin film and its local surface mechanical properties were studied by AFM. The Young's moduli of the grating, the stripes and the reference area were determined through force curves and the tip-sample energy dissipation was calculated from the tapping mode point spectroscopy curves. Significant difference was obtained between the created structures and the reference area regarding the Young's modulus and the tip-sample energy dissipation.",
keywords = "AFM, chalcogenide, electron beam recording, holographic recording, Young modulus",
author = "Judit Kaman and Attila Bonyar and Istvan Csarnovics and C. Cserh{\'a}ti",
year = "2015",
month = "11",
day = "30",
doi = "10.1109/SIITME.2015.7342294",
language = "English",
isbn = "9781509003327",
pages = "51--55",
booktitle = "2015 IEEE 21st International Symposium for Design and Technology in Electronic Packaging, SIITME 2015",
publisher = "Institute of Electrical and Electronics Engineers Inc.",

}

TY - GEN

T1 - Investigation of mechanical properties of the generated surface structures on a chalcogenide thin film with AFM

AU - Kaman, Judit

AU - Bonyar, Attila

AU - Csarnovics, Istvan

AU - Cserháti, C.

PY - 2015/11/30

Y1 - 2015/11/30

N2 - Light induced holographic grating and electron beam induced stripes were created on Ge28Se72 chalcogenide thin film and its local surface mechanical properties were studied by AFM. The Young's moduli of the grating, the stripes and the reference area were determined through force curves and the tip-sample energy dissipation was calculated from the tapping mode point spectroscopy curves. Significant difference was obtained between the created structures and the reference area regarding the Young's modulus and the tip-sample energy dissipation.

AB - Light induced holographic grating and electron beam induced stripes were created on Ge28Se72 chalcogenide thin film and its local surface mechanical properties were studied by AFM. The Young's moduli of the grating, the stripes and the reference area were determined through force curves and the tip-sample energy dissipation was calculated from the tapping mode point spectroscopy curves. Significant difference was obtained between the created structures and the reference area regarding the Young's modulus and the tip-sample energy dissipation.

KW - AFM

KW - chalcogenide

KW - electron beam recording

KW - holographic recording

KW - Young modulus

UR - http://www.scopus.com/inward/record.url?scp=84960330430&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84960330430&partnerID=8YFLogxK

U2 - 10.1109/SIITME.2015.7342294

DO - 10.1109/SIITME.2015.7342294

M3 - Conference contribution

SN - 9781509003327

SP - 51

EP - 55

BT - 2015 IEEE 21st International Symposium for Design and Technology in Electronic Packaging, SIITME 2015

PB - Institute of Electrical and Electronics Engineers Inc.

ER -